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Optical element having two axes of rotation for use in tightly spaced mirror arrays

  • US 6,984,917 B2
  • Filed: 06/06/2002
  • Issued: 01/10/2006
  • Est. Priority Date: 06/06/2002
  • Status: Expired due to Term
First Claim
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1. An apparatus comprising:

  • a cradle;

    a plate rotatably coupled to said cradle along a first rotational axis, wherein the plate has a footprint that extends outside of a footprint of the cradle;

    a frame fixedly attached to a first substrate, wherein said cradle is rotatably coupled to said frame along a second rotational axis;

    at least one electrode formed at a first region in a second substrate; and

    at least one electrode formed at a second region in the second substrate, wherein the first substrate is attached to the second substrate such that the plate is superposed over the at least one electrode at the first region and the cradle is superposed over the at least one electrode at the second region.

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