Optical waveguides and grating structures fabricated using polymeric dielectric compositions
First Claim
1. An optical device comprising:
- at least one BCB waveguide structure;
at least one BCB grating structure disposed on said at least one BCB waveguide structure;
cladding material on which said at least one waveguide structure is disposed; and
optionallya substrate on which said cladding material is disposed, wherein at least one feature of said grating or waveguide is nano-scale.
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Abstract
Using polymeric dielectric materials (preferably materials derived from bisbenzocyclobutene monomers) and an electron beam lithography process for patterning this material, we have developed a process for fabricating optical waveguides with complex integrated devices such as gratings. Such gratings are not limited to one-dimensional type gratings but can include 2 dimensional gratings such as curved gratings or photonic crystals. Due to the properties of BCB, this process could also be implemented using optical photolithography depending upon the waveguide dimensions desired and the grating dimensions desired. Alternatively, the optical waveguide could be patterned using optical lithography and the grating can be patterned using electron beam lithography. In addition, the general process described below can be applied to the fabrication of complex lightwave circuits containing, for example, multiple optical waveguides, couplers/splitters, grating based filters and even more complex devices and structures.
20 Citations
20 Claims
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1. An optical device comprising:
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at least one BCB waveguide structure; at least one BCB grating structure disposed on said at least one BCB waveguide structure; cladding material on which said at least one waveguide structure is disposed; and
optionallya substrate on which said cladding material is disposed, wherein at least one feature of said grating or waveguide is nano-scale. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A tunable optical device having at least one integrated waveguide and grating structure comprising:
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a substrate material containing one or more electrically contacted heat producing elements; a cladding material disposed on said substrate; at least one waveguide structure disposed on said cladding material; at least one grating structure disposed on or near said waveguide structure;
wherein said waveguide structure and/or said grating structure are in close proximity to said thermal element. - View Dependent Claims (16, 17)
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18. A tunable optical device having at least one integrated waveguide and grating structure comprising:
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a substrate material containing one or more electrically contacted heat producing elements; a planarizing material disposed on top of said heat producing elements; a cladding material disposed on said planarizing material; at least one waveguide structure disposed on said cladding material; at least one grating structure disposed on or near said waveguide structure;
wherein said waveguide structure and/or said grating structure are in close proximity to said thermal element. - View Dependent Claims (19, 20)
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Specification