Method and apparatus for monitoring parts in a material processing system
First Claim
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1. A material processing system comprising:
- a processing tool, wherein the processing tool includes at least one process chamber;
a plurality of RF (radio-frequency)-responsive part identifiers coupled to the processing tool, a RF-responsive part identifier being configured to generate part ID (identification) data for the processing tool and transmit the part ID data;
a sensor interface assembly (SIA) configured to receive the part ID data from at least one RF-responsive part identifier, anda controller coupled to the SIA and configured to verify that a proper part has been installed in the material processing system based on said part ID data.
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Abstract
The present invention presents an improved apparatus and method for monitoring parts in a material processing system, wherein the material processing system includes a processing tool, a number of RF-responsive part identifiers coupled to the processing tool to generate and transmit part ID data, and a sensor interface assembly (SIA) configured to receive the part ID data from the plurality of RF-responsive part identifiers.
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Citations
81 Claims
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1. A material processing system comprising:
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a processing tool, wherein the processing tool includes at least one process chamber; a plurality of RF (radio-frequency)-responsive part identifiers coupled to the processing tool, a RF-responsive part identifier being configured to generate part ID (identification) data for the processing tool and transmit the part ID data; a sensor interface assembly (SIA) configured to receive the part ID data from at least one RF-responsive part identifier, and a controller coupled to the SIA and configured to verify that a proper part has been installed in the material processing system based on said part ID data. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55)
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56. A plasma processing system comprising:
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a processing tool, wherein the processing tool includes a plasma chamber; a plurality of RF (radio-frequency)-responsive part identifiers coupled to the processing tool to generate and transmit part ID data, wherein at least one RF-responsive part identifier is coupled to the plasma chamber; a sensor interface assembly (SIA) configured to receive the part ID (identification) data from the plurality of RF-responsive part identifiers; and a controller coupled to the SIA and configured to verify that a proper part has been installed in the plasma processing system based on said part ID data. - View Dependent Claims (57)
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58. A method of monitoring a material processing system comprising a processing tool, wherein the processing tool includes at least one process chamber, the method comprising:
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providing a RF (radio-frequency)-responsive part identifier coupled to the processing tool, wherein the RF-responsive part identifier is configured to generate and transmit part ID (identification) data; providing a sensor interface assembly (SIA), wherein the SIA is configured to receive the part ID data from the RF-responsive part identifier; and verifying that a proper part has been installed in the material processing system based on said part ID data. - View Dependent Claims (59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81)
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Specification