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Method of aligning a template with a substrate employing moire patterns

  • US 6,986,975 B2
  • Filed: 04/05/2004
  • Issued: 01/17/2006
  • Est. Priority Date: 07/16/2000
  • Status: Expired due to Term
First Claim
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1. A method of determining an alignment between a substrate and a template spaced-apart from said substrate and having a distance defined therebetween, said substrate having a first pattern disposed thereon and said template having a second pattern disposed thereon, said method comprising;

  • locating a formable material between said template and said substrate; and

    establishing said distance between said substrate and said template such that said template and said substrate concurrently contact said formable material and a Moiré

    pattern may be sensed in response to said first and second patterns being in superimposition when said template and said substrate are in a desired spatial relationship.

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