Method of aligning a template with a substrate employing moire patterns

• US 6,986,975 B2
• Filed: 04/05/2004
• Issued: 01/17/2006
• Est. Priority Date: 07/16/2000
• Status: Expired due to Term

• Current Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Original Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Inventors: Sreenivasan, Sidlgata V., Choi, Byung J., Bailey, Todd, Colburn, Matthew
• Primary Examiner(s): Young, Christopher G.
• Application Number:
  US10/818,099
• Publication Number:
  US 20040189996A1
• Time in Patent Office: 652 Days
• Field of Search: 430/22, 430/30
• US Class Current: 430/22
• CPC Class Codes: B29C 2035/0827 using UV radiation
• CPC Class Codes: B29C 2043/025 forming a microstructure, i.e. fine patterning
• CPC Class Codes: B29C 35/0888 using transparant moulds
• CPC Class Codes: B29C 37/005 Compensating volume or shape change during moulding, in general
• CPC Class Codes: B29C 37/0053 Moulding articles characterised by the shape of the surface, e.g. ribs, high polish mould construction therefor B29C33/42; surface shaping of articles B29C59/00; by incorporating filler in or near the surface B29C70/64
• CPC Class Codes: B29C 43/003 characterised by the choice of material
• CPC Class Codes: B29C 43/021 characterised by the shape of the surface
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: G03F 9/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00
• CPC Class Codes: Y10S 101/36 Means for registering or alignment of print plates on print press structure
• CPC Class Codes: Y10T 428/24802 Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]

Abstract

The present invention includes a method of determining an alignment between a substrate and a template spaced-apart from the substrate and having a distance defined therebetween, the substrate having a first pattern disposed thereon and the template having a second pattern disposed thereon, the method including, sensing the first and the second pattern, with the distance being established such that the first and the second pattern form a desired moiré pattern when the template and the substrate are in a desired spatial relationship.

Claims

1. A method of determining an alignment between a substrate and a template spaced-apart from said substrate and having a distance defined therebetween, said substrate having a first pattern disposed thereon and said template having a second pattern disposed thereon, said method comprising;

locating a formable material between said template and said substrate; and

establishing said distance between said substrate and said template such that said template and said substrate concurrently contact said formable material and a Moiré

pattern may be sensed in response to said first and second patterns being in superimposition when said template and said substrate are in a desired spatial relationship.

2. The method as recited in claim 1 further including providing said formable material with a thickness less than approximately 0.25 micrometer.

3. The method as recited in claim 1 further including providing said formable material with a thickness less than approximately 0.1 micrometer.

4. The method as recited in claim 1 wherein establishing further includes dispersing said formable material to be disposed between said first and second patterns and sensing said first and second patterns to determine whether said desired pattern is present before said formable material is disposed between said first and second patterns.

5. The method as recited in claim 1 wherein locating further includes disposing said formable material on said substrate as a plurality of spaced-apart droplets.

6. The method as recited in claim 1 wherein locating further includes disposing a line of said formable material on said substrate, with said line having opposed ends and being continuous between said opposed ends.

7. The method as recited in claim 1 further including depositing, on said substrate, a continuous line of said formable material, with said continuous line having an circular shape.

8. The method as recited in claim 1 further including disposing, upon said substrate, a serpentine line of said formable material.

9. The method as recited in claim 1 wherein sensing further includes sensing said first pattern and said second pattern concurrently.

10. The method as recited in claim 1 further including providing an optical measurement tool having a depth of focus such that said first and second patterns lie within said depth of focus upon said distance being established.

11. A method of determining an alignment between a substrate and a template spaced-apart from said substrate a distance defining a gap therebetween, said substrate having a first pattern disposed thereon and said template having a second pattern disposed thereon, said method comprising:

locating a formable material having a volume associated therewith, in said gap; and

establishing said distance such that said volume fills portions of said gap not in superimposition with said first and second patterns so that a Moiré

pattern may be sensed in response to said first and second patterns being in superimposition when said template and said substrate are in a desired spatial relationship.

12. The method as recited in claim 11 further including spreading said formable material to form a layer between said substrate and said template, with said layer having a thickness associated therewith defined by said distance.

13. The method as recited in claim 11 further including sensing said first pattern and said second pattern concurrently.

14. The method as recited in claim 11 further including providing an optical measurement tool having a depth of focus such that said first and second patterns lie within said depth of focus upon said distance being established.

15. The method as recited in claim 11 wherein positioning further includes position a line of said formable material on said substrate, with said line having opposed ends and being continuous between said opposed ends.

16. The method as recited in claim 11 wherein positioning further includes depositing, on said substrate, a continuous line of said formable material, with said continuous line having an circular shape.

17. The method as recited in claim 11 wherein position further includes disposing, upon said substrate, a serpentine line of said formable material.

18. A method of determining an alignment between a substrate and a template, said substrate having a first pattern disposed thereon and said template having a second pattern disposed thereon, said method comprising:

positioning said template to be spaced-apart from said substrate having a distance defined therebetween, with said first pattern being in superimposition with said second pattern;

locating formable material, having a thickness associated therewith, between said substrate and said template, with said distance being a function of said thickness; and

sensing said first and said second pattern, with said distance being established such that said first and said second pattern form a Moiré

pattern when said template and said substrate are in a desired spatial relationship.

19. The method as recited in claim 18 wherein said sensing further including sensing said first pattern and said second pattern concurrently.

20. The method as recited in claim 18 further including providing an optical measurement tool having a depth of focus such that said first and second patterns lie within said depth of focus upon said distance being established.

21. The method as recited in claim 18 further including positioning a line of said formable material on said substrate, with said line having opposed ends and being continuous between said opposed ends.

22. The method as recited in claim 18 further including depositing, on said substrate, a continuous line of said formable material, with said continuous line having an circular shape.

23. The method as recited in claim 18 further including disposing, upon said substrate, a serpentine line of said formable material.