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Method and apparatus of producing high-density polyimide (HPI) film

  • US 6,987,162 B2
  • Filed: 09/20/2002
  • Issued: 01/17/2006
  • Est. Priority Date: 10/23/2001
  • Status: Expired due to Fees
First Claim
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1. A manufacturing equipment for producing a high-density polyimide film, comprising:

  • a vacuum cavity, used to provide a low pressure reaction environment of 20 torrs or below;

    a raw material supplying means to supply raw material containing idimide bond into said vacuum cavity for reaction;

    an energy supplier being disposed in said vacuum cavity to provide energy for the decomposition, repeated decomposition, and recombination of said raw material; and

    a clad laminator and associated clad laminator tool being disposed in said vacuum cavity, wherein said clad is used for producing said polyidimide film to accumulate on, and said clad laminator tool is used to fix said clad laminator in position.

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