Methods and apparatus for particle reduction in MEMS devices
First Claim
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1. A micro-electromechanical system (MEMS) device comprising:
- a micro-machine comprising a die and at least one each of a proof mass, a motor drive comb, a motor pick-off comb, and a sense plate;
a housing for said micro-machine;
a cover configured to be attached to said housing, said cover and said housing forming a substantially sealed cavity; and
a getter within the substantially sealed cavity, said micro machine attached to said housing such that a surface of said die is between micro-machine and said getter to shield said proof mass, said motor drive comb, said motor pick-off comb, and said sense plate from particles that become dislodged from said getter.
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Abstract
A method for assembling a micro-electromechanical system (MEMS) device that includes a micro-machine is described. The method comprises forming the micro-machine on a die, the die having a top surface and a bottom surface, providing a plurality of die bonding pedestals on a surface of a housing, and mounting at least one of the top surface of the die and components of the micro-machine to the die bonding pedestals such that a bottom surface of the die at least partially shields components of the micro-machine from loose gettering material.
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Citations
16 Claims
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1. A micro-electromechanical system (MEMS) device comprising:
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a micro-machine comprising a die and at least one each of a proof mass, a motor drive comb, a motor pick-off comb, and a sense plate; a housing for said micro-machine; a cover configured to be attached to said housing, said cover and said housing forming a substantially sealed cavity; and a getter within the substantially sealed cavity, said micro machine attached to said housing such that a surface of said die is between micro-machine and said getter to shield said proof mass, said motor drive comb, said motor pick-off comb, and said sense plate from particles that become dislodged from said getter. - View Dependent Claims (2, 3, 4, 5, 16)
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6. A micro-electromechanical system (MEMS) gyroscope comprising:
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a housing; a micro-machine comprising a die, at least one sense plate, at least one proof mass suspended a distance from said at least one sense plate, at least one motor drive comb and at least one motor pick-off comb; a getter comprising gettering material; and a cover attached to said housing, said cover and said housing configured to form a substantially sealed cavity for said micro-machine and said getter, said die mounted within the cavity such that gettering material that becomes dislodged from said getter is substantially blocked from contacting said sense plates, said proof masses, said motor drive combs, and said motor pick-off combs by a surface of said die. - View Dependent Claims (7, 8, 9, 10)
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11. A micro-electromechanical system (MEMS) accelerometer comprising:
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a housing; a micro-machine comprising a die, at least one sense plate, at least one proof mass suspended a distance from said at least one sense plate, at least one motor drive comb and at least one motor pick-off comb; a getter comprising gettering material; and a cover attached to said housing, said cover and said housing configured to form a substantially sealed cavity for said micro-machine and said getter, said die mounted within the cavity such that gettering material that becomes dislodged from said getter is substantially blocked from contacting said sense plates, said proof masses, said motor drive combs, and said motor pick-off combs by a surface of said die. - View Dependent Claims (12, 13, 14, 15)
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Specification