Piezoelectric transducers
First Claim
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1. A piezoelectric transducer comprising:
- a) a chamber diaphragm having first and second opposing surfaces, a given chamber diaphragm thickness, and a given chamber diaphragm width,b) a mesa having first and second opposing surfaces, a given mesa thickness, and a given mesa width wherein the first surface of the mesa is adjacent to the first surface of the chamber diaphragm, andc) a first piezoelectric material element having a first piezoelectric material element width adjacent to the second surface of the mesa, andd) a second piezoelectric material element having a second piezoelectric material element width adjacent to the second surface of the chamber diaphragm.
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Abstract
A system and method of operation for a piezoelectric transducer is described which utilizes a mesa structure interposed between a piezoelectric material element and a chamber diaphragm. The system can be used as a sensor where a net motion to the diaphragm causes a net charge equal to the sum of the charges on each piezoelectric diaphragm. Alternatively, the system can be used as an actuator wherein an applied voltage causes movement of the piezoelectric transducer and the chamber diaphragm.
14 Citations
17 Claims
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1. A piezoelectric transducer comprising:
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a) a chamber diaphragm having first and second opposing surfaces, a given chamber diaphragm thickness, and a given chamber diaphragm width, b) a mesa having first and second opposing surfaces, a given mesa thickness, and a given mesa width wherein the first surface of the mesa is adjacent to the first surface of the chamber diaphragm, and c) a first piezoelectric material element having a first piezoelectric material element width adjacent to the second surface of the mesa, and d) a second piezoelectric material element having a second piezoelectric material element width adjacent to the second surface of the chamber diaphragm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A piezoelectric transducer comprising:
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a) a chamber diaphragm having first and second opposing surfaces, a given chamber diaphragm thickness, and a given chamber diaphragm width, b) mesa having first and second opposing surface, a given mesa thickness, and a given mesa width wherein the first surface of the mesa is adjacent to the first surface of the chamber diaphragm, and c) first and second piezoelectric material elements, each element having a given piezoelectric material element width wherein the first piezoelectric element is adjacent to the second surface of the mesa and the second piezoelectric element is adjacent to second surface of the chamber diaphragm.
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Specification