Apparatus and method for measuring spatially varying bidirectional reflectance distribution function
First Claim
1. An apparatus for measuring, as a function of incident beam geometry, the energy distribution emitted from a sample comprising:
- a) a source for producing a substantially collimated source radiation beam directed along an optical path;
b) a paraboloidal reflector, having an optical axis disposed substantially parallel to the tangent of the sample surface at a selected sample location to be measured, the reflector positioned to intercept the collimated radiation beam at a first location on the reflector and to focus the intercepted beam to form an incident beam that strikes the sample at the selected sample location with a selected angle of incidence, whereupon the radiation from the incident beam is redirected by the sample into an emitted radiation distribution at least a portion of which is intercepted and reflected by the reflector;
c) a detector for receiving the emitted radiation distribution reflected by the reflector; and
d) a controller for varying the relative orientation of the source to the mirror to vary the angle of incidence of illumination, and for calculating the distribution of radiation received by the detector as a function of angle of emission from the sample and as a function of the angle of incidence of the illumination of the sample to compute a BRDF of the sample.
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Accused Products
Abstract
An apparatus and method for measuring spatially varying bidirectional reflectance distribution function and method are provided. The apparatus and method provide means to illuminate different areas of a sample at different angles of incidence and detect the angular variation of radiation emitted from the sample in response to the illumination. The apparatus includes a paraboloidal reflector for delivering the illumination and receiving the radiation emitted by the sample, a radiation source for generating a beam of collimated radiation, a beam steering device for controlling the angle of incidence with which the focused cone of light strikes the sample, and a detector to receive the collected light from the reflector.
122 Citations
110 Claims
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1. An apparatus for measuring, as a function of incident beam geometry, the energy distribution emitted from a sample comprising:
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a) a source for producing a substantially collimated source radiation beam directed along an optical path; b) a paraboloidal reflector, having an optical axis disposed substantially parallel to the tangent of the sample surface at a selected sample location to be measured, the reflector positioned to intercept the collimated radiation beam at a first location on the reflector and to focus the intercepted beam to form an incident beam that strikes the sample at the selected sample location with a selected angle of incidence, whereupon the radiation from the incident beam is redirected by the sample into an emitted radiation distribution at least a portion of which is intercepted and reflected by the reflector; c) a detector for receiving the emitted radiation distribution reflected by the reflector; and d) a controller for varying the relative orientation of the source to the mirror to vary the angle of incidence of illumination, and for calculating the distribution of radiation received by the detector as a function of angle of emission from the sample and as a function of the angle of incidence of the illumination of the sample to compute a BRDF of the sample. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46)
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47. An apparatus for measuring, as a function of incident beam geometry, the energy distribution emitted from a sample comprising:
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a) a source for producing a substantially collimated source radiation beam directed along an optical path; b) a paraboloidal reflector, having an optical axis disposed substantially parallel to the tangent of the sample surface at a selected sample location to be measured, the reflector positioned to intercept the collimated radiation beam at a first location on the reflector and to focus the intercepted beam to form an incident beam that strikes the sample at the selected sample location with a selected angle of incidence, whereupon the radiation from the incident beam is redirected by the sample into an emitted radiation distribution at least a portion of which is intercepted and reflected by the reflector; c) a detector for receiving the emitted radiation distribution reflected by the reflector; d) a beam steerer for directing the radiation beam to the first location on the reflector; e) a detector translator for moving the detector with respect to the reflector whereby varying portions of the emitted radiation distribution are received by the detector; and f) a controller for controlling the beam steerer to vary the relative orientation of the source to the mirror to vary the angle of incidence of illumination, and for calculating the distribution of radiation received by the detector as a function of angle of emission from the sample and as a function of the angle of incidence of the illumination of the sample to compute a BRDF of the sample. - View Dependent Claims (48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88)
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89. A method for measuring, as a function of incident beam geometry, the energy distribution emitted from a sample comprising the steps of:
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a) directing a beam of substantially collimated radiation along an optical path; b) receiving the collimated radiation beam by a paraboloidal reflector, having an optical axis disposed substantially parallel to the tangent of the sample surface at a selected sample location to be measured, and focusing the received beam to form an incident beam that strikes the sample at the selected sample location with a selected angle of incidence, whereupon the radiation from the incident beam is redirected by the sample into an emitted radiation distribution; c) intercepting, with the reflector, at least a portion of the emitted radiation distribution and directing such portion of the emitted radiation distribution as an emitted radiation beam; d) detecting the emitted radiation beam so that a measurement can be made of the intensity of the emitted radiation beam as a function of an angle of emission of the emitted radiation beam and as a function the angle of incidence of the incident beam. - View Dependent Claims (90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103)
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104. An apparatus for measuring, as a function of incident beam geometry, the energy distribution emitted from a sample comprising:
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a) a source for producing a substantially collimated source radiation beam directed along an optical path; b) a paraboloidal reflector, having an optical axis disposed substantially parallel to the tangent of the sample surface at a selected sample location to be measured, the reflector positioned to intercept the collimated radiation beam at a first location on the reflector and to focus the intercepted beam to form an incident beam that strikes the sample at the selected sample location with a selected angle of incidence, whereupon the radiation from the incident beam is redirected by the sample into an emitted radiation distribution at least a portion of which is intercepted and reflected by the reflector; c) a detector for receiving the emitted radiation distribution reflected by the reflector; d) a source aperture disposed along the optical path between the source and the reflector; e) a beam steerer for moving the source aperture with respect to the reflector to direct the source radiation beam to the first location on the reflector; and f) a beam splitter disposed along the optical path between the source aperture and the reflector, for receiving the source radiation beam and directing the source radiation beam to the reflector. - View Dependent Claims (105, 106)
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107. An apparatus for measuring, as a function of incident beam geometry, the energy distribution emitted from a sample comprising:
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a) a source for producing a substantially collimated source radiation beam directed along an optical path; b) a paraboloidal reflector, having an optical axis disposed parallel to the optical path, positioned to intercept the collimated radiation beam at a first location on the reflector and to focus the intercepted beam to form an incident beam that strikes the sample at a selected sample location with a selected angle of incidence, whereupon the radiation from the incident beam is redirected by the sample into an emitted radiation distribution at least a portion of which is intercepted and reflected by the reflector; c) a detector for receiving the emitted radiation distribution reflected by the reflector; and d) a beam steerer comprising at least one rotatable aperture disk for directing the radiation beam to the first location on the reflector through the rotation of the disk. - View Dependent Claims (108, 109, 110)
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Specification