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Vibration monitoring in optical and opto-electronic beam guiding systems

  • US 6,987,626 B2
  • Filed: 03/20/2003
  • Issued: 01/17/2006
  • Est. Priority Date: 03/20/2003
  • Status: Expired due to Fees
First Claim
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1. An optical component mount with beam deviation monitoring, said optical component mount comprising:

  • a) a location for mounting an optical element for operating on a beam;

    b) at least one sensor attached to said optical component mount at a predetermined position to at least one mode of said optical component mount for determining a state of said optical component mount;

    such that a deviation of said beam is determinable from said state.

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