Vibration monitoring in optical and opto-electronic beam guiding systems
First Claim
1. An optical component mount with beam deviation monitoring, said optical component mount comprising:
- a) a location for mounting an optical element for operating on a beam;
b) at least one sensor attached to said optical component mount at a predetermined position to at least one mode of said optical component mount for determining a state of said optical component mount;
such that a deviation of said beam is determinable from said state.
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Accused Products
Abstract
An optical component mount with beam deviation monitoring and beam guiding system using such optical component mounts. The optical component mount has a location for mounting an optical element thereon for operating on the beam and at least one sensor attached to the optical mount at a predetermined position to at least one mode of the optical component mount. The predetermined position is selected depending on the state of the optical component mount. The state can be, e.g., a vibrational state or a thermal expansion state. The predetermined position is chosen near or at an anti-node of at least one mode contributing to the state. The state of the optical mount is determined based on the signals obtained from the at least one sensor, which can be an accelerometer in the case of monitoring a vibrational state or a temperature sensor in the case of monitoring a thermal expansion state.
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Citations
30 Claims
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1. An optical component mount with beam deviation monitoring, said optical component mount comprising:
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a) a location for mounting an optical element for operating on a beam; b) at least one sensor attached to said optical component mount at a predetermined position to at least one mode of said optical component mount for determining a state of said optical component mount; such that a deviation of said beam is determinable from said state. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A beam guiding system with beam deviation monitoring, said beam guiding system comprising:
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a) a plurality of optical component mounts; b) a plurality of locations for mounting optical elements on said optical component mounts for operating on a beam; c) at least one sensor attached to at least one of said optical component mounts at a predetermined position to at least one mode of said at least one of said optical component mounts for determining a state of said at least one optical component mounts; such that a deviation of said beam is determinable from said state. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A method for controlling a deflection of a beam propagating in a beam guiding system comprising optical component mounts having locations for mounting optical elements thereon, said method comprising:
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a) attaching at least one sensor to at least one of said optical component mounts at a predetermined position to at least one mode of said at least one of said optical component mounts for determining a state of said at least one of said optical component mounts; b) translating said state into a deflection of said beam. - View Dependent Claims (26, 27, 28, 29, 30)
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Specification