Optical switch with 3D waveguides

• US 6,987,901 B2
• Filed: 03/03/2003
• Issued: 01/17/2006
• Est. Priority Date: 03/01/2002
• Status: Expired due to Fees

• Current Assignee: Rosemount Incorporated (Emerson Electric Company)
• Original Assignee: Rosemount Incorporated (Emerson Electric Company)
• Inventors: Frick, Roger L.
• Primary Examiner(s): Ullah, Akm Enayet
• Assistant Examiner(s): Petkovsek, Daniel
• Application Number:
  US10/379,284
• Publication Number:
  US 20030223681A1
• Time in Patent Office: 1,051 Days
• Field of Search: 385/10, 385/14, 385 16- 18, 385/22, 385/23, 385/30, 385/37, 385/42, 359/872, 359/877
• US Class Current: 385/23
• CPC Class Codes: G02B 6/12002 Three-dimensional structures
• CPC Class Codes: G02B 6/351 involving stationary waveguides with moving interposed optical elements G02B6/3538 takes precedence; interposed waveguides G02B6/3502
• CPC Class Codes: G02B 6/3534 the optical element being diffractive, i.e. a grating
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3576 Temperature or heat actuation thermal forces controlling reflecting elements in general G02B26/0866; thermo-optic devices G02F1/0147
• CPC Class Codes: G02B 6/3578 Piezoelectric force piezoelectric forces controlling reflecting elements in general G02B26/0858; piezo-optic devices G02F1/0131
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 6/3596 With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate

Abstract

An optical switch for routing optical signals between optical fibers is shown. Signals are guided internally in an optically transparent substrate by buried waveguides that are directly coupled to the optical fibers. These waveguides form a 3-dimensional optical routing structure internal to the substrate. Signals are coupled between adjacent waveguides by total internal reflection at the surfaces of the substrate. A moveable diffraction grating is coupled to these optical signals at points of total internal reflection via evanescent coupling. This coupling causes a change in direction of the optical signal and routes the signal to the desired waveguide. Known techniques can be used to form the waveguides by writing them with a pulsed laser. Local heating causes a permanent increase in refractive index that forms a single mode waveguide structure. The resulting device has low losses and can be formed by low cost MEMs processes.

Claims

1. An optical switch comprising:

a substrate;

a first buried optical waveguide for propagating an optical signal, where said optical signal propagates in the first optical waveguide along a first direction and under total internal reflection off of a first surface of the substrate at a total internal reflection region;

a second buried optical waveguide extending in a second direction different than the first direction; and

a diffractive optical element disposed above the total internal reflection region of the substrate and moveable relative thereto between a switching position above the substrate and in evanescent coupling with the optical signal propagating under total internal reflection off of the first surface wherein the optical signal is switched from the first optical waveguide into the second optical waveguide and a non-switching position wherein the optical signal reflects off of the first surface under total internal reflection and within the first buried optical waveguide.

2. The optical switch of claim 1, wherein both the first buried optical waveguide and the second buried optical waveguide are disposed within the substrate to propagate the optical signal under total internal reflection within the substrate.

3. The optical switch of claim 1, further comprising:

an optical fiber coupled to one of the first buried optical waveguide and the second buried optical waveguide.

4. The optical switch of claim 3, wherein the optical fiber is a single-mode optical fiber.

5. The optical switch of claim 1, further comprising a third buried optical waveguide disposed adjacent the total internal reflection region, such that the diffractive optical element being in the non-switching position couples the optical signal from the first buried optical waveguide into the third buried optical waveguide via total internal reflection.

6. The optical switch of claim 1, wherein the diffractive optical element has a grating period that is substantially equal to the wavelength of light of the optical signal in the substrate.

7. The optical switch of claim 1, wherein the diffractive optical element is formed of a plurality of strips forming a diffraction grating, where each strip has a substantially equal width and where each of the strips are spaced apart a substantially equal spacing.

8. The optical switch of claim 7, wherein the diffraction grating is suspended from an anchor fixedly mounted to the substrate.

9. The optical switch of claim 7, wherein the diffraction grating is suspended from a first anchor and a second anchor by flexible members, where both said first anchor and said second anchor are fixedly mounted to the substrate and where the flexible members allow movement of the diffraction grating between said switching position and said non-switching position.

10. The optical switch of claim 7, further comprising an electrostatic actuator disposed adjacent the diffraction grating.

11. The optical switch of claim 7, wherein the strips are formed of a material selected from the group consisting of amorphous silicon, crystalline silicon, and poly silicon.

12. The optical switch of claim 1, wherein the diffractive optical element has an index of refraction that is substantially equal to that of the first buried optical waveguide and that of the second buried optical waveguide.

13. The optical switch of claim 1, wherein the first buried optical waveguide and the first direction are in a first plane, and wherein the second buried optical waveguide and the second direction are in a second plane forming an acute angle with the first plane.

14. An optical switch comprising:

a substrate having a plurality of intersection regions;

a buried input waveguide within the substrate for propagating an optical signal under total internal reflection;

a plurality of buried output waveguides within the substrate for propagating the optical signal, wherein each of the plurality of buried output waveguides is disposed adjacent the buried input waveguide at one of the plurality of intersection regions; and

a plurality of diffractive optical elements, each diffractive optical element disposed above one of the plurality of intersection regions, and each diffractive optical element is individually moveable relative to the substrate between a non-switching position and a switching position evanescently coupled to the optical signal propagating under total internal reflection off of a first surface of the substrate to couple the optical signal into one of the plurality of buried output waveguides.

15. The optical switch of claim 14, wherein each of the plurality of diffractive optical elements is formed of a set of strips, where each strip in the set of strips has a substantially equal width and substantially equal spacing to an adjacent strip.

16. The optical switch of claim 14, wherein the input waveguide extends from adjacent the first surface of the substrate to adjacent a second, opposing surface of the substrate to achieve the total internal reflection propagation within the substrate.

17. The optical switch of claim 16, wherein the plurality of output waveguides extend from adjacent the top first surface of the substrate to adjacent the second, opposing surface of the substrate to propagate the optical signal via total internal reflection.

18. The optical switch of claim 14, wherein the input waveguide has a first extent parallel to the first surface of the substrate and a second extent perpendicular to the first surface of the substrate.

19. The optical switch of claim 14, wherein at least one of the plurality of output waveguides has a first extent parallel to the first surface of the substrate and a second extent perpendicular to the first surface of the substrate.

20. A method of switching an optical signal comprising:

forming a buried input waveguide in a substrate, the buried input waveguide extending in a first direction;

forming a buried output waveguide in the substrate, the buried output waveguide extending in a second direction different from the first direction; and

disposing a diffractive optical element adjacent the substrate for movement between a switching position above the substrate and evanescently coupled to the optical signal propagating under total internal reflection, wherein the optical signal propagating in the buried input waveguide is coupled into the buried output waveguide, and a non-switching position above the substrate wherein the optical signal propagating in the buried input waveguide is not coupled into the buried output waveguide.

21. The method of claim 20, wherein forming the buried input waveguide includes forming the buried input waveguide to extend from between a top surface of the substrate and a bottom surface of the substrate.

22. The method of claim 21, wherein forming the buried input waveguide includes forming the buried input waveguide to extend from between the top surface and the bottom surface.

23. The method of claim 20, further comprising:

providing the diffractive optical element in the form of a diffraction grating having a grating period that is substantially equal to the wavelength of light of the optical signal in the substrate.

24. The method of claim 23, wherein the diffractive optical element comprises a plurality of strips each having a substantially equal width and a substantially equal spacing between an adjacent strip.

25. The method of claim 20, further comprising disposing an electrostatic actuator adjacent the diffractive optical element for moving the diffractive optical element between a switching position and a non-switching position.