Dynamic metrology sampling methods, and system for performing same
First Claim
1. A method, comprising:
- creating a plurality of metrology sampling rules;
assigning each of said plurality of metrology sampling rules a sampling weight value;
identifying at least one workpiece that satisfies at least one of said plurality of metrology sampling rules;
associating said sampling weight value for each of said satisfied metrology sampling rules with said identified workpieces that satisfy said rules; and
indicating a metrology operation should be performed when a cumulative total of said sampling weight values is at least equal to a pre-established trigger value.
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Accused Products
Abstract
The present invention is generally directed to various methods and systems for adaptive metrology sampling plans that may be employed to monitor various manufacturing processes. In one example, the method includes creating a plurality of metrology sampling rules, assigning each of the metrology sampling rules a sampling weight value, identifying at least one workpiece that satisfies at least one of the metrology sampling rules, assigning the sampling weight value for each of the satisfied metrology sampling rules with the identified workpieces that satisfy the rules, and indicating a metrology operation should be performed when a cumulative total of the sampling weight values is at least equal to a pre-established trigger value.
64 Citations
32 Claims
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1. A method, comprising:
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creating a plurality of metrology sampling rules; assigning each of said plurality of metrology sampling rules a sampling weight value; identifying at least one workpiece that satisfies at least one of said plurality of metrology sampling rules; associating said sampling weight value for each of said satisfied metrology sampling rules with said identified workpieces that satisfy said rules; and indicating a metrology operation should be performed when a cumulative total of said sampling weight values is at least equal to a pre-established trigger value. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method, comprising:
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creating a plurality of metrology sampling rules; assigning each of said plurality of metrology sampling rules a sampling weight value; identifying at least one workpiece that satisfies at least one of said plurality of metrology sampling rules; associating said sampling weight value for each of said satisfied metrology sampling rules with said identified workpieces that satisfy said rules; and indicating a metrology operation should be performed when a cumulative total of said sampling weight values for one of said plurality of metrology sampling rules is at least equal to a pre-established trigger value. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A method, comprising:
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creating a plurality of metrology sampling rules; assigning each of said plurality of metrology sampling rules a sampling weight value; identifying at least one workpiece that satisfies at least one of said plurality of metrology sampling rules; associating said sampling weight value for each of said satisfied metrology sampling rules with said identified workpieces that satisfy said rules; and indicating a metrology operation should be performed when a cumulative total of said sampling weight values for one of said workpieces is at least equal to a pre-established trigger value. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification