Methods and systems for processing a substrate using a dynamic liquid meniscus
First Claim
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1. A method of moving a meniscus from a first surface to a second surface, comprising:
- forming a meniscus between a proximity head and a first surface, the proximity head including;
a plurality of source inlets in the proximity head; and
a plurality of source outlets in the proximity head, wherein forming the meniscus includes injecting a selected liquid from the first plurality of ports between the proximity head and the first surface and applying a vacuum to the second plurality of ports between the proximity head and the first surface; and
moving the meniscus from the first surface to an adjacent second surface, the second surface being parallel to the first surface.
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Abstract
A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.
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Citations
42 Claims
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1. A method of moving a meniscus from a first surface to a second surface, comprising:
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forming a meniscus between a proximity head and a first surface, the proximity head including;
a plurality of source inlets in the proximity head; and
a plurality of source outlets in the proximity head, wherein forming the meniscus includes injecting a selected liquid from the first plurality of ports between the proximity head and the first surface and applying a vacuum to the second plurality of ports between the proximity head and the first surface; and
moving the meniscus from the first surface to an adjacent second surface, the second surface being parallel to the first surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A system for moving a meniscus from a first surface to a second surface, comprising:
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a first surface;
a second surface being substantially co-planar with the first surface; and
a movable head capable of being moved in a first direction substantially perpendicularly toward the first surface and the second surface and capable of being moved in a second direction substantially parallel to the first surface and the second surface wherein the movable head is capable of forming a meniscus between the movable head and at least one of the first surface or the second surface, the movable head including;
a plurality of source inlets; and
a plurality of source outlets, wherein forming the meniscus includes injecting a selected liquid from the first plurality of ports between the movable head and the first surface and applying a vacuum to the second plurality of ports between the movable head and the first surface. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24)
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25. A method of optimizing surface tension gradient of a meniscus, comprising:
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selecting a first material for a first surface;
selecting a second material for a second surface, the first material having a different hydrophilic property than the second material, wherein the first surface is a proximity head and the second surface is a substrate, the proximity head including a plurality of source inlets and a plurality of source outlets; and
forming a meniscus between the first surface and the second surface. - View Dependent Claims (26, 27)
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28. A system having an optimized surface tension gradient, comprising:
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a first surface including a first material;
a second surface including a second material, the first material having a different hydrophilic property than the second material, the first surface being substantially parallel and proximate to the second surface, wherein the first surface is a proximity head and the proximity head is capable of forming a meniscus between the head and the second surface, the proximity head including;
a plurality of source inlets; and
a plurality of source outlets, wherein forming the meniscus includes injecting a selected liquid from the first plurality of ports between the proximity head and the first surface and applying a vacuum to the second plurality of ports between the proximity head and the first surface. - View Dependent Claims (29, 30, 31)
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32. A method of processing an edge of a substrate, comprising:
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forming a meniscus inside a concave portion of a head, the concave portion being capable of receiving at least a portion of an edge of the substrate, wherein the concave portion of the head includes;
a plurality of source inlets; and
a plurality of source outlets, wherein forming the meniscus includes injecting a selected liquid from the first plurality of ports into the concave portion of the head and applying a vacuum to the second plurality of ports in the concave portion of the head; and
moving the meniscus onto the edge of the substrate such that a leading edge of the meniscus is split in to a first leading edge and a second leading edge, the first leading edge being supported between a top surface of the substrate and corresponding top inside surface of the head, the second leading edge being supported between a bottom surface of the substrate and corresponding bottom inside surface of the head. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40)
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41. A system for processing an edge of a substrate comprising:
a head including;
a concave portion, the concave portion capable of receiving an edge of a substrate; and
a plurality of ports opening into the concave portion, the plurality of ports including;
a process liquid injection port;
two or more vacuum ports; and
at least one surface tension control port. - View Dependent Claims (42)
Specification