Capacitance type sensor
First Claim
1. A capacitance type sensor comprising:
- a substrate determining an XY-plane in a defined XYZ three-dimensional coordinate system;
a detective member facing said substrate;
a conductive member facing said substrate;
a plurality of capacitance element electrodes formed on said substrate and cooperating with said conductive member to form a plurality of first capacitance elements, respectively;
a reference electrode formed on said substrate and cooperating with said conductive member to form a second capacitance element, wherein said reference electrode is grounded or kept at a certain potential; and
an insulating member disposed in between said conductive member and said plurality of capacitance element electrodes, and movable in parallel with said substrate as said detective member is moved along said XY-plane,wherein said plurality of first capacitance elements are operatively connected in series with said second capacitance element, respectively, andwherein displacement of said detective member is detected on the basis of detection of changes in the respective capacitance values of said plurality of first capacitance elements caused by a change, along said XY-plane, of the position of an end portion of said insulating member between said conductive member and said plurality of capacitance element electrodes.
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Accused Products
Abstract
Capacitance element electrodes (E1 to E5) and a grounded reference electrode (E0) are formed on a substrate (20). At a position opposite to these electrodes (E0 to E5), a displacement electrode (40) is disposed that is Z-axially deformable as a detective member (30) is externally operated to move Z-axially. The displacement electrode (40) cooperates with the reference electrode (E0) and capacitance element electrodes (E1 to E5) to form capacitance elements (C0 to C5), respectively. Each of the capacitance elements (C1 to C5) is connected in series with the capacitance element (C0) with respect to a signal externally input. Changes in the capacitance values of the capacitance elements (C1 to C5) as the detective member (30) is moved are detected to sense the displacement of the detective member (30).
61 Citations
33 Claims
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1. A capacitance type sensor comprising:
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a substrate determining an XY-plane in a defined XYZ three-dimensional coordinate system; a detective member facing said substrate; a conductive member facing said substrate; a plurality of capacitance element electrodes formed on said substrate and cooperating with said conductive member to form a plurality of first capacitance elements, respectively; a reference electrode formed on said substrate and cooperating with said conductive member to form a second capacitance element, wherein said reference electrode is grounded or kept at a certain potential; and an insulating member disposed in between said conductive member and said plurality of capacitance element electrodes, and movable in parallel with said substrate as said detective member is moved along said XY-plane, wherein said plurality of first capacitance elements are operatively connected in series with said second capacitance element, respectively, and wherein displacement of said detective member is detected on the basis of detection of changes in the respective capacitance values of said plurality of first capacitance elements caused by a change, along said XY-plane, of the position of an end portion of said insulating member between said conductive member and said plurality of capacitance element electrodes. - View Dependent Claims (18, 19, 20)
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2. A capacitance type sensor comprising:
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a substrate determining an XY-plane in a defined XYZ three-dimensional coordinate system; a detective member facing said substrate; a conductive member disposed in between said substrate and said detective member, wherein said conductive member is Z-axially movable as said detective member is Z-axially moved; a plurality of capacitance element electrodes formed on said substrate and cooperating with said conductive member to form a plurality of first capacitance elements, respectively; and a reference electrode formed on said substrate and cooperating with said conductive member to form a second capacitance element, said reference electrode being grounded or kept at a certain potential, wherein said plurality of first capacitance elements are operatively connected in series with said second capacitance element, respectively, and wherein displacement of said detective member is detected on the basis of detection of changes in the respective capacitance values of said first capacitance elements caused by changes in the distance between said conductive member and at least one of said plurality of first capacitance element electrodes.
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3. A capacitance type sensor comprising:
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a conductive member determining an XY-plane in a defined XYZ three-dimensional coordinate system; a plurality of capacitance element electrodes cooperating with said conductive member to form a plurality of first capacitance elements, respectively; a reference electrode cooperating with said conductive member to form a second capacitance element, wherein said reference electrode is grounded or kept at a certain potential; and a detective member Z-axially movable to displace distance between said conductive member and at least one of said plurality of capacitance element electrodes, and wherein said plurality of first capacitance elements are operatively connected in series with said second capacitance element, respectively, and wherein displacement of said detective member is detected on the basis of detection of changes in the respective capacitance values of said plurality of first capacitance elements caused by changes in the distance. - View Dependent Claims (4, 5, 6, 7, 8, 9)
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10. A capacitance type sensor comprising:
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a conductive member determining an XY-plane in a defined XYZ three-dimensional coordinate system; a plurality of capacitance element electrodes cooperating with said conductive member to form a plurality of first capacitance elements, respectively; a reference electrode cooperating with said conductive member to form a second capacitance element, wherein said reference electrode is grounded or kept at a certain potential; an insulating member disposed in between said conductive member and said pair of capacitance element electrodes; and a detective member movable along said XY-plane to change a positional relationship between said insulating member and at least one of said conductive member and said plurality of capacitance element electrodes, wherein said plurality of first capacitance elements are operatively connected in series with said second capacitance element, respectively, and wherein displacement of said detective member is detected on the basis of detection of changes in the respective capacitance values of said plurality of first capacitance elements caused by a change of the positional relationship. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 21, 22)
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23. A capacitance type sensor comprising:
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a substrate determining an XY-plane in a defined XYZ three-dimensional coordinate system; a detective member facing said substrate; a conductive member disposed in between said substrate and said detective member, wherein said conductive member is Z-axially movable as said detective member is Z-axially moved; a pair of first capacitance element electrodes formed on said substrate symmetrically with respect to a Y-axis and cooperating with said conductive member to form a pair of first capacitance elements, respectively; a pair of second capacitance element electrodes formed on said substrate symmetrically with respect to an X-axis and cooperating with said conductive member to form a pair of second capacitance elements, respectively; a third capacitance element electrode formed on said substrate in proximity of an origin of said XYZ three-dimensional coordinate system and cooperating with said conductive member to form a third capacitance element; and a reference electrode formed on said substrate and cooperating with said conductive member to form a fourth capacitance element, wherein said reference electrode is grounded or kept at a certain potential, wherein each of said pair of first capacitance elements, said pair of second capacitance elements, and said third capacitance element is operatively connected in series with said fourth capacitance element, and wherein displacement of said detective member is detected on the basis of detection of changes in the respective capacitance values of said pair of first capacitance elements, said pair of second capacitance elements, and said third capacitance element caused by changes in distances between said conductive member and said pair of first capacitance element electrodes, said pair of second capacitance element electrodes, and said third capacitance element electrode. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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Specification