System and method for dose control in a lithographic system

• US 6,989,920 B2
• Filed: 05/29/2003
• Issued: 01/24/2006
• Est. Priority Date: 05/29/2003
• Status: Active Grant

• Current Assignee: ASML Holding NV
• Original Assignee: ASML Holding NV
• Inventors: Hintersteiner, Jason D., Bleeker, Arno, van der Mast, Karel
• Primary Examiner(s): Ben, Loha
• Application Number:
  US10/447,214
• Publication Number:
  US 20040239907A1
• Time in Patent Office: 971 Days
• Field of Search: 359/237, 359/224, 359/290, 359/291, 359/298, 359/618, 359/619, 359/622, 359/627, 359/637, 359/855, 430/5, 430/22, 430/30, 355/53, 355/55, 355/67, 355/69, 355/71, 355/77, 250/548, 250/492.1, 250/492, 250/458.1, 250/461.1, 250/492.2, 356/317, 385/140
• US Class Current: 359/237
• CPC Class Codes: G03F 7/70041 by pulsed sources, e.g. multiplexing, pulse duration, interval control or intensity control
• CPC Class Codes: G03F 7/70558 Dose control, i.e. achievement of a desired dose

Abstract

A system and method are used for pulse to pulse dose control in an illumination system, used, for example, in a lithography or a maskless lithography machine. The system and method can be used to decrease effective laser pulse-to-pulse variability in lithographic lasers, allowing adequate dose control using a minimum number of pulses (e.g. as little as one pulse).

Claims

1. An illumination system comprising:

a light source; and

an adjusting system including an optical attenuator that adjusts light output from the light source to produce a desired light output signal, wherein the adjusting system is one of a passive adjusting system and an active adjusting system.

2. The system of claim 1, wherein the optical attenuator comprises:

a non-linear attenuator.

3. The system of claim 2, wherein the light source produces a beam above a predetermined energy level and the non-linear attenuator is used to clip the light energy substantially at the predetermined energy level.

4. The system of claim 2, wherein the adjusting system further comprises:

an adjustable attenuator placed after the non-linear attenuator.

5. The system of claim 1, further comprising:

a beam splitter that splits the light output from the light source into a first beam that is diverted from the adjusting system and a second beam that is transmitted through the adjusting system, wherein the first beam has substantially less energy than the second beam; and

a summing device that combines the first beam and the second beam, after the second beam has passed through the adjusting system, to produce the desired light output signal.

6. The system of claim 5, wherein the adjusting system comprises:

a sensor that generates a sensor signal based on the energy of the second beam;

a processor that generates a control signal based on the sensor signal, wherein the control signal is used to control the adjusting system.

7. The system of claim 6, wherein the optical attenuator comprises:

an adjustable attenuator that is adjusted based on the control signal.

8. The system of claim 1, wherein the light source comprises:

a first laser generating a first light beam having a first energy value;

a delay device in a light path of the first light beam; and

a second laser generating a second light beam having a second energy value, the first energy value being higher than the second energy value, wherein the first light beam is passed through the adjusting system to adjust the second energy value,

wherein the delay device delays the first light beam relative to the second light beam.

9. The system of claim 8, further comprising:

a summer that combines the first light beam and the adjusted second light beam to produce the desired light output signal.

10. The system of claim 8, wherein:

the optical attenuator comprises an adjustable attenuator in a light path of the second light beam; and

the adjusting system further comprises;

a sensor that generates a sensed signal based on the first energy value; and

a processor that generates a control signal used to adjust the adjustable attenuator.

11. The system of claim 8, wherein the first light beam is generated earlier in time compared to the second light beam.

12. The system of claim 8, further comprising:

a controller that generates a control signal to control the first laser and the second laser; and

a delay device that receives and delays the control signal from the controller before the signal is received by the second laser.

13. The system of claim 1, wherein the light source comprises:

a first laser producing a first beam having a first energy value; and

a second laser producing a second beam having a second energy value.

14. The system of claim 13, further comprising:

a controller that generates a control signal to control the first laser and the second laser; and

a delay device that receives and delays the control signal from the controller before the signal is received by the second laser.

15. The system of claim 1, wherein:

the optical attenuator is an adjustable attenuator; and

the system further comprises;

a beam splitter positioned after the light source to split the beam into first and second portions;

wherein the adjustable attenuator positioned in a light path of the the second portion, wherein the adjustable attenuator is adjusted based on an energy value of the first portion to adjust an energy value of the second portion; and

a summer that combines the adjusted second portion and the first portion to form the desired light output signal.

16. The system of claim 1, wherein the system is coupled to a maskless lithography device.

17. An illumination system, comprising:

a light source; and

a non-linear optical attenuator that attenuates light from the light source,

wherein the illumination system is arranged to be coupled to a maskless lithography device.

18. The system of claim 17, further comprising:

an adjustable optical attenuator positioned after the non-linear optical attenuator.

19. An illumination system, comprising:

a first light source that produces a first light beam having a first energy value;

a second light source that produces a second light beam having a second energy value;

an adjusting system that adjusts the second light beam based on the first energy value; and

a combining device that combines the adjusted second light beam and the first light beam.

20. The system of claim 19, wherein the adjusting system comprises:

a sensor that generates an energy signal based on the first energy value;

a processor that generates a control signal based on the energy signal;

an attenuator that performs the adjustment of the second light beam based on the control signal; and

a delay device that delays propagation of the first light beam after it has been sensed and before it is combined with the adjusted second light beam.

21. The system of claim 19, wherein the system is coupled to a maskless lithography device.

22. An illumination system, comprising:

a light source that generates a light beam;

a beam splitter that splits the light beam into first and second light beams;

an adjustment system that adjusts the first light beam based on an energy value of the second light beam; and

a combining device that combines the adjusted first light beam and the second light beam.

23. The system of claim 22, wherein the adjustment system comprises:

a processor that generates a control signal based on the energy value of the second light beam; and

an attenuator that performs the adjustment of the first light beam based on the control signal.

24. A maskless lithography system having an illumination system, the illumination system comprising:

a light source; and

an adjusting system that adjusts light output from the light source to produce a desired light output signal.

25. The system of claim 24, wherein the adjusting system comprises:

a non-linear attenuator.

26. The system of claim 25, wherein the light source produces a beam above a predetermined energy level and the non-linear attenuator is used to clip the light energy substantially at the predetermined energy level.

27. The system of claim 25, wherein the adjusting system further comprises:

an adjustable attenuator placed after the non-linear attenuator.

28. The system of claim 24, further comprising:

a beam splitter that splits the light output from the light source into a first beam that is diverted from the adjusting system and a second beam that is transmitted through the adjusting system, wherein the first beam has substantially less energy than the second beam; and

a summing device that combines the first beam and the second beam, after the second beam has passed through the adjusting system, to produce the desire light output signal.

29. The system of claim 28, wherein the adjusting system comprises:

a sensor that generates a sensor signal based on the energy of the second beam;

a processor that generates a control signal based on the sensor signal, wherein the control signal controls the adjusting system.

30. The system of claim 29, wherein the adjusting system further comprises:

an adjustable attenuator that is adjusted based on the control signal.

31. The system of claim 24, wherein the light source comprises:

a first laser generating a first light beam having a first energy value;

a delay device in a light path of the first light beam; and

a second laser generating a second light beam having a second energy value, the first energy value being higher than the second energy value,

wherein the first light beam is passed through the adjusting system to adjust the second energy value,

wherein the delay device delays the first light beam relative to the second light beam.

32. The system of claim 31, further comprising:

a summer that combines the first light beam and the adjusted second light beam to produce the desired light output signal.

33. The system of claim 31, wherein the adjusting system comprises:

an adjustable attenuator in a light path of the second light beam;

a sensor that generates a sensed signal based on the first energy value; and

a processor that generates a control signal to adjust the adjustable attenuator.

34. The system of claim 31, wherein the first light beam is generated earlier in time compared to the second light beam.

35. The system of claim 31, further comprising:

a controller that generates a control signal to control the first laser and the second laser; and

a delay device that receives and delays the control signal from the controller before the signal is received by the second laser.

36. The system of claim 24, wherein the light source comprises:

a first laser producing a first beam having a first energy value; and

a second laser producing a second beam having a second energy value.

37. The system of claim 36, further comprising:

a controller that generates a control signal to control the first laser and the second laser; and

a delay device that receives and delays the control signal from the controller before the signal is received by the second laser.

38. The system of claim 24, further comprising:

a beam splitter positioned after the light source to split the beam into first and second portions;

an adjustable attenuator positioned in a light path of the second portion, wherein the adjustable attenuator is adjusted based on an energy value of the first portion to adjust an energy value of the second portion; and

a summer that combines the adjusted second portion and the first portion to form the desired light output signal.

39. The system of claim 24, wherein the adjusting system is a passive adjusting system.

40. The system claim 24, wherein the adjusting system is an active adjusting system.