Distributed bragg reflector for optoelectronic device
First Claim
1. A vertical cavity surface emitting laser, comprising:
- an active region for emitting light at a predetermined wavelength in response to an applied electric current;
a first distributed Bragg reflector mirror situated adjacent one side of the active region, said first distributed Bragg reflector mirror for reflecting light emitted by said active region back toward said active region;
a second distributed Bragg reflector mirror situated adjacent the opposite side of said active region, said second distributed Bragg reflector mirror for reflecting light emitted by said active region back toward said active region;
wherein said second distributed Bragg reflector mirror includes;
a first layer having an Al content below about 35%;
a second layer having an Al content between about 70% and 90%;
an oxide aperture forming layer having an Al content greater than about 95%;
wherein said oxide aperture forming layer is disposed between said first layer and said second layer; and
a transition region disposed between said oxide aperture forming layer and said first layer, wherein said transition region has an Al content that varies from a higher Al content near said oxide aperture forming layer to a lower Al content near said first layer.
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Abstract
An oxide-confined VCSELs having a distributed Bragg reflector with a heavily doped high Al content oxide aperture forming layer disposed between a low Al content first layer and a medium Al content second layer. Between the first layer and the oxide aperture forming layer there may be a thin transition region wherein the Al content changes from a higher Al content to a lower Al content. In some embodiments, the Al concentration from the oxide aperture forming layer to the second layer may occur in a step. The oxide aperture forming layer may be disposed at or near a null or a node of the electric field produced by resonant laser light. During the oxidization of the oxide aperture forming layer, all or some of the other aluminum bearing DBR layers may also become oxidized, but to a substantially lesser degree. The junction between the oxidized portion and un-oxidized portion of these layers is believed to reduce the stability and/or reliability of the device. To alleviate this, the present invention contemplates providing an implant, etch or other suitable process to reduce or eliminate one or more electrical artifacts associated with the junction between the oxidized portion and un-oxidized portion of these layers as well as reducing the oxidation of other aluminum bearing layers of the DBR.
139 Citations
24 Claims
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1. A vertical cavity surface emitting laser, comprising:
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an active region for emitting light at a predetermined wavelength in response to an applied electric current;
a first distributed Bragg reflector mirror situated adjacent one side of the active region, said first distributed Bragg reflector mirror for reflecting light emitted by said active region back toward said active region;
a second distributed Bragg reflector mirror situated adjacent the opposite side of said active region, said second distributed Bragg reflector mirror for reflecting light emitted by said active region back toward said active region;
wherein said second distributed Bragg reflector mirror includes;
a first layer having an Al content below about 35%;
a second layer having an Al content between about 70% and 90%;
an oxide aperture forming layer having an Al content greater than about 95%;
wherein said oxide aperture forming layer is disposed between said first layer and said second layer; and
a transition region disposed between said oxide aperture forming layer and said first layer, wherein said transition region has an Al content that varies from a higher Al content near said oxide aperture forming layer to a lower Al content near said first layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A Vertical Cavity Surface Emitting Laser (VCSEL), comprising:
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an active region for emitting light at a predetermined wavelength in response to an applied electric current;
a first distributed Bragg reflector mirror situated on one side of said active region, said first distributed Bragg reflector mirror for reflecting light emitted by said active region back toward said active region;
a second distributed Bragg reflector mirror situated on an opposite side of said active region, said second distributed Bragg reflector mirror for reflecting light emitted by said active region back toward said active region, the second distributed Bragg reflector mirror having a side edge;
wherein said second distributed Bragg reflector mirror includes;
one or more first DBR mirror layers, each of the one or more first DBR mirror layers including an oxidized region extending from the side edge of the second DBR to an oxide termination edge that is situated greater than a first distance from the side edge of the second DBR;
one or more second DBR mirror layers, each of the one or more second DBR mirror layers including an oxidized region extending from the side edge of the second DBR to an oxide termination edge that is situated less than a second distance from the side edge of the second DBR, wherein the first distance is greater than the second distance;
means for reducing or eliminating one or more electrical artifacts related to the oxide termination edge of at least some of the one or more second DBR mirror layers;
a first one of the one or more second DBR mirror layers having a first concentration of an oxidizable material;
a second one of the second DBR mirror layers having a second concentration of an oxidizable material; and
a selected one of the one or more first DBR mirror layers having a third concentration of an oxidizable material, wherein the selected one of the one or more first DBR mirror layers is disposed between said first one of the second DBR mirror layers and said second one of the second DBR mirror layers, and wherein the first concentration of the oxidizable material is less than the second concentration of the oxidizable material, and the second concentration of the oxidizable material is below the third concentration of the oxidizable material. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification