Isolated resonator gyroscope with isolation trimming using a secondary element
First Claim
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1. A resonator gyroscope, comprising:
- an isolated resonator;
one or more flexures for supporting the isolated resonator;
a baseplate affixed to the resonator by the one or more flexures;
drive and sense elements affixed to the baseplate for exciting the resonator sensing movement of the gyroscope; and
at least one secondary element affixed to the baseplate for trimming isolation of the resonator;
wherein the isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited.
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Abstract
The present invention discloses a resonator gyroscope including an isolated resonator. One or more flexures support the isolated resonator and a baseplate is affixed to the resonator by the flexures. Drive and sense elements are affixed to the baseplate and used to excite the resonator and sense movement of the gyroscope. In addition, at least one secondary element (e.g., another electrode) is affixed to the baseplate and used for trimming isolation of the resonator. The resonator operates such that it transfers substantially no net momentum to the baseplate when the resonator is excited. Typically, the isolated resonator comprises a proof mass and a counterbalancing plate.
31 Citations
26 Claims
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1. A resonator gyroscope, comprising:
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an isolated resonator;
one or more flexures for supporting the isolated resonator;
a baseplate affixed to the resonator by the one or more flexures;
drive and sense elements affixed to the baseplate for exciting the resonator sensing movement of the gyroscope; and
at least one secondary element affixed to the baseplate for trimming isolation of the resonator;
wherein the isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method, comprising the steps of:
- providing an isolated resonator;
supporting the isolated resonator with one or more flexures;
affix drive and sense electrodes to the baseplate for exciting the resonator and movement of the gyroscope;
affix at least one secondary element for trimming isolation of the resonator; and
affixing a baseplate to the resonator by the one or more flexures;
wherein the isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
- providing an isolated resonator;
Specification