Force detection device
First Claim
1. A force detection device comprising:
- a base plate, having a top surface parallel to an XY plane in an XYZ three-dimensional coordinate system having an X-axis, a Y-axis and a X-axis;
a first displaceable plate, positioned along a plane intersecting a positive part of the X-axis and supported on said base plate in a displaceable manner;
a second displaceable plate, positioned along a plane intersecting a negative part of the X-axis and supported on said base plate in a displaceable manner;
a first fixed plate, positioned between the Z-axis and said first displaceable plate and fixed onto said base plate;
a second fixed plate, positioned between the Z-axis and said second displaceable plate and fixed onto said base plate;
a fixed top plate, positioned along a plane spanning across a vicinity of an upper edge of said first fixed plate and a vicinity of an upper edge of said second fixed plate;
a displaceable top plate, positioned above said fixed top plate, supported so as to be displaceable with respect to said base plate, and transmitting, to an upper edge of said first displaceable plate and an upper edge of said second displaceable plate, a force in a direction along the XY plane;
a force receiving member, positioned on the Z-axis above said displaceable top plate in order to receive a force that is to be detected;
a connecting member, positioned along the Z-axis in order to connect said force receiving member and said displaceable top plate;
a first X-axis distance sensor, detecting a distance between said first displaceable plate and said first fixed plate;
a second X-axis distance sensor, detecting a distance between said second displaceable plate and said second fixed plate;
an inclination degree sensor, detecting an inclination degree of said displaceable top plate with respect to said fixed top plate; and
a detection processing unit, detecting a force Fx in the X-axis direction, acting on said force receiving member, based on a difference between a detection value of said first X-axis distance sensor and a detection value of said second X-axis distance sensor, and detecting a moment My about the Y-axis, acting on said force receiving member, based on a detection value of an inclination degree in relation to the X-axis direction that is detected by said inclination degree sensor.
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Accused Products
Abstract
Forces and moments are detected in a distinguished manner by a simple structure. An outer box-like structure formed of a metal is set on top of an insulating substrate and an insulating inner box-like structure is contained in the interior. Five electrodes E1 to E5 are positioned on a top plate of the inner box-like structure. Four electrodes E6 to E9 are positioned on the four side surfaces of the inner box-like structure. Capacitance elements C1 to C5 are arranged by electrodes E1 to E5 and a top plate of the outer box-like structure and capacitance elements C6 to C9 are arranged by electrodes E6 to E9 and side plates of the outer box-like structure. A force Fx in the X-axis direction is detected by means of the capacitance difference between C6 and C7, a force Fy in the Y-axis direction is detected by means of the capacitance difference between C8 and C9, a force Fz in the Z-axis direction is detected by means of the capacitance of C5, a moment My about the Y-axis is detected by means of the capacitance difference between C1 and C2, and a moment Mx about the X-axis is detected by means of the capacitance difference between C3 and C4.
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Citations
25 Claims
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1. A force detection device comprising:
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a base plate, having a top surface parallel to an XY plane in an XYZ three-dimensional coordinate system having an X-axis, a Y-axis and a X-axis; a first displaceable plate, positioned along a plane intersecting a positive part of the X-axis and supported on said base plate in a displaceable manner; a second displaceable plate, positioned along a plane intersecting a negative part of the X-axis and supported on said base plate in a displaceable manner; a first fixed plate, positioned between the Z-axis and said first displaceable plate and fixed onto said base plate; a second fixed plate, positioned between the Z-axis and said second displaceable plate and fixed onto said base plate; a fixed top plate, positioned along a plane spanning across a vicinity of an upper edge of said first fixed plate and a vicinity of an upper edge of said second fixed plate; a displaceable top plate, positioned above said fixed top plate, supported so as to be displaceable with respect to said base plate, and transmitting, to an upper edge of said first displaceable plate and an upper edge of said second displaceable plate, a force in a direction along the XY plane; a force receiving member, positioned on the Z-axis above said displaceable top plate in order to receive a force that is to be detected; a connecting member, positioned along the Z-axis in order to connect said force receiving member and said displaceable top plate; a first X-axis distance sensor, detecting a distance between said first displaceable plate and said first fixed plate; a second X-axis distance sensor, detecting a distance between said second displaceable plate and said second fixed plate; an inclination degree sensor, detecting an inclination degree of said displaceable top plate with respect to said fixed top plate; and a detection processing unit, detecting a force Fx in the X-axis direction, acting on said force receiving member, based on a difference between a detection value of said first X-axis distance sensor and a detection value of said second X-axis distance sensor, and detecting a moment My about the Y-axis, acting on said force receiving member, based on a detection value of an inclination degree in relation to the X-axis direction that is detected by said inclination degree sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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Specification