Pressure sensor module having stress isolation platform
First Claim
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1. A pressure sensor module comprising:
- a base structure; and
a pressure sensor adhered to the base structure via an adhesive layer, said pressure sensor comprising a pressure sensing element, wherein the adhesive layer adheres only a first portion of the pressure sensor to the base structure to create an isolation gap between a second portion of the sensor and the base structure, wherein the isolation gap forms a cantilever member via the second portion of the sensor that provides stress isolation to the pressure sensing element.
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Abstract
A pressure sensor module is provided with an isolation platform which isolates stress. The pressure sensor module includes a base structure and a cantilever member formed in the base structure by an isolation gap. A pressure sensing element is located on the cantilever member such that the cantilever member provides stress isolation to the pressure sensing element.
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Citations
9 Claims
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1. A pressure sensor module comprising:
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a base structure; and
a pressure sensor adhered to the base structure via an adhesive layer, said pressure sensor comprising a pressure sensing element, wherein the adhesive layer adheres only a first portion of the pressure sensor to the base structure to create an isolation gap between a second portion of the sensor and the base structure, wherein the isolation gap forms a cantilever member via the second portion of the sensor that provides stress isolation to the pressure sensing element. - View Dependent Claims (2, 3)
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4. A pressure sensor module comprising:
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a base structure comprising a first member and a second member fixed to the first member;
an adhesive layer adhering only a first portion of the first member to the second member to create an isolation gap between a second portion of the first member and the second members, wherein a cantilever member is formed via the second portion of the first member by the isolation gap; and
a pressure sensing element located on the cantilever member, wherein the cantilever member provides stress isolation to the pressure sensing element. - View Dependent Claims (5, 6)
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7. A method of forming a stress isolated pressure sensor module comprising the steps of:
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providing a base structure;
applying an adhesive layer to a portion of the base structure; and
adhering a pressure sensor comprising a pressure sensing element onto the base structure via the adhesive layer, wherein the pressure sensor is adhered onto a portion of the base structure to create an isolation gap between a remaining portion of the pressure sensor, wherein the cantilever member is formed by the isolation gap so that the cantilever member provides stress isolation to the pressure sensing element. - View Dependent Claims (8, 9)
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Specification