Surface pressure distribution sensor and manufacturing method for the same

• US 6,993,980 B2
• Filed: 05/30/2003
• Issued: 02/07/2006
• Est. Priority Date: 05/31/2002
• Status: Expired due to Fees

• Current Assignee: Sanyo Electric Company Limited (Panasonic Holdings Corporation)
• Original Assignee: Sanyo Electric Company Limited (Panasonic Holdings Corporation)
• Inventors: Shimizu, Makoto, Ueda, Hiroyuki, Mitsui, Masashi
• Primary Examiner(s): Lefkowitz, Edward
• Assistant Examiner(s): Allen, Andre
• Application Number:
  US10/448,458
• Publication Number:
  US 20040049363A1
• Time in Patent Office: 984 Days
• Field of Search: 738/620.46, 737/77, 382/124, 382/125
• US Class Current: 73/862.046
• CPC Class Codes: G01L 1/146 for measuring force distributions, e.g. using force arrays G01L1/148 takes precedence
• CPC Class Codes: G01L 1/148 using semiconductive material, e.g. silicon
• CPC Class Codes: G06V 40/1306 non-optical, e.g. ultrasonic or capacitive sensing

Abstract

In view of conventional circumstances where a surface pressure distribution sensor has poor reproducibility when mass-produced, so it has been desired to stabilize sensing properties, to secure reliability, and to improve productivity and yield, the invention achieves stabilizing sensing properties, securing reliability, and improving productivity and yield by optimizing the size of the flow barrier provided inside the sealing agent and the gap, the material and location of the contact, and the tension of the common electrode film.

Claims

1. A surface pressure distribution sensor comprising:

a substrate;

unit detection elements disposed on the substrate;

a flexible conductive film disposed over the substrate so that a distance between the flexible conductive film and the substrate is between 15 μ

m and 40 μ

m;

a sealing agent attaching the flexible conductive film to the substrate; and

fibers or spherical spacers disposed in the sealing agent so that the distance between the flexible conductive film and the substrate is determined by a diameter of the fibers or the spherical spacers.

2. The surface pressure distribution sensor of claim 1 wherein the unit detection elements are disposed in a form of a matrix on the substrate, each of the unit detection elements includes a switching element and a contact electrode connected to the switching element, and the switching elements are configured to be sequentially turned on to detect a conduction between the contact electrodes and the flexible conductive film.

3. The surface pressure distribution sensor of claim 1 wherein the diameter of the fibers or the spherical spacers is between 15 μ

m and 40 μ

m.

4. The surface pressure distribution sensor of claim 1 wherein the fibers are made of a resin or a glass.

5. A surface pressure distribution sensor comprising:

a substrate;

unit detection elements disposed on the substrate;

a flexible conductive film disposed over the substrate so that a distance between the flexible conductive film and the substrate is between 15 μ

m and 40 μ

m;

a sealing agent attaching the flexible conductive film to the substrate;

a flow barrier disposed on an inner side of the sealing agent with respect to the substrate; and

a contact pad disposed on the inner side of the sealing agent.

6. The surface pressure distribution sensor claim 5 wherein the unit detection elements are disposed in a form of a matrix on the substrate, each of the switching element, and the switching elements are configured to be sequentially turned on to detect a conduction between the contact electrodes and the flexible conductive film.

7. A surface pressure distribution sensor comprising:

a substrate;

unit detection elements disposed on the substrate;

a flexible conductive film disposed over the substrate;

a sealing agent attaching the flexible conductive film to the substrate; and

fibers or spherical spacers disposed in the sealing agent so that a distance between the flexible conductive film and the substrate is determined by a diameter of the fibers or the spherical spacers.

8. The surface pressure distribution sensor of claim 7 wherein the unit detention elements are disposed in a form of a matrix on the substrate, each of the unit detection elements includes a switching element and a contact electrode connected to the switching element, and the switching elements are configured to be sequentially turned on to detect a conduction between the contact electrodes and the flexible conductive film.

9. A surface pressure distribution sensor comprising:

a substrate;

unit detection elements disposed on the substrate;

a flexible conductive film disposed over the substrate;

a sealing agent attaching the flexible conductive film to the substrate;

a flow barrier disposed on an inner side of the sealing agent with respect to the substrate; and

a contact pad disposed on the inner side of the sealing agent.

10. The surface pressure distribution sensor of claim 9 wherein the unit detection elements are disposed in a form of a matrix on the substrate, each of the unit detection elements includes a switching element and a contact electrode connected to the switching element, and the switching elements are configured to be sequentially turned on to detect a conduction between the contact electrodes and the flexible conductive film.