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Surface pressure distribution sensor and manufacturing method for the same

  • US 6,993,980 B2
  • Filed: 05/30/2003
  • Issued: 02/07/2006
  • Est. Priority Date: 05/31/2002
  • Status: Expired due to Fees
First Claim
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1. A surface pressure distribution sensor comprising:

  • a substrate;

    unit detection elements disposed on the substrate;

    a flexible conductive film disposed over the substrate so that a distance between the flexible conductive film and the substrate is between 15 μ

    m and 40 μ

    m;

    a sealing agent attaching the flexible conductive film to the substrate; and

    fibers or spherical spacers disposed in the sealing agent so that the distance between the flexible conductive film and the substrate is determined by a diameter of the fibers or the spherical spacers.

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