Fluorescence detecting device with integrated circuit and photodiode, and detection method
First Claim
Patent Images
1. A fluorescence detecting device comprising:
- a semiconductor integrated circuit substrate including a plurality of photodiodes and a signal detecting circuit for detecting charges obtained as a result of photoelectric conversion by the plurality of photodiodes; and
a fluorescence reaction vessel where a fluorescence reaction occurs, the fluorescence reaction vessel being formed on the plurality of the photodiodes, with a plurality of photodiodes provided per one fluorescence reaction vessel;
wherein the fluorescence reaction in the one fluorescence reaction vessel generates fluorescence that enters the plurality of photodiodes and is subjected to the photoelectric conversion, andwherein an excitation-light-entry preventing layer is formed at either or both of a surface portion of the plurality of photodiodes and a position between the plurality of photodiodes and the fluorescence reaction vessel;
wherein the photodiodes include a high concentration first-conductivity-type semiconductor layer, a second-conductivity-type semiconductor layer, and a low-concentration first-conductivity-type semiconductor layer that are laminated in the stated order from a surface side of the photodiodes, whereinwhen a reverse bias is applied, a part of the high-concentration first-conductivity- type semiconductor layer is not depleted, and the second-conductivity-type semiconductor layer is depleted, andthe high-concentration first-conductivity-type semiconductor layer constitutes the excitation-light-entry preventing layer.
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Abstract
A fluorescence detecting device is configured so that a semiconductor integrated circuit substrate includes a photodiode and a signal detecting circuit for detecting charges obtained as a result of photoelectric conversion by the photodiode, and a fluorescence reaction vessel where a fluorescence reaction occurs is arranged above the foregoing photodiode. Furthermore, in the device, an excitation-light-entry preventing layer is provided at one or more of a surface portion of the photodiode and a position between the photodiode and the fluorescence reaction vessel.
23 Citations
8 Claims
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1. A fluorescence detecting device comprising:
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a semiconductor integrated circuit substrate including a plurality of photodiodes and a signal detecting circuit for detecting charges obtained as a result of photoelectric conversion by the plurality of photodiodes; and a fluorescence reaction vessel where a fluorescence reaction occurs, the fluorescence reaction vessel being formed on the plurality of the photodiodes, with a plurality of photodiodes provided per one fluorescence reaction vessel; wherein the fluorescence reaction in the one fluorescence reaction vessel generates fluorescence that enters the plurality of photodiodes and is subjected to the photoelectric conversion, and wherein an excitation-light-entry preventing layer is formed at either or both of a surface portion of the plurality of photodiodes and a position between the plurality of photodiodes and the fluorescence reaction vessel; wherein the photodiodes include a high concentration first-conductivity-type semiconductor layer, a second-conductivity-type semiconductor layer, and a low-concentration first-conductivity-type semiconductor layer that are laminated in the stated order from a surface side of the photodiodes, wherein when a reverse bias is applied, a part of the high-concentration first-conductivity- type semiconductor layer is not depleted, and the second-conductivity-type semiconductor layer is depleted, and the high-concentration first-conductivity-type semiconductor layer constitutes the excitation-light-entry preventing layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification