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Fluorescence detecting device with integrated circuit and photodiode, and detection method

  • US 6,995,386 B2
  • Filed: 10/08/2004
  • Issued: 02/07/2006
  • Est. Priority Date: 05/22/2001
  • Status: Expired due to Fees
First Claim
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1. A fluorescence detecting device comprising:

  • a semiconductor integrated circuit substrate including a plurality of photodiodes and a signal detecting circuit for detecting charges obtained as a result of photoelectric conversion by the plurality of photodiodes; and

    a fluorescence reaction vessel where a fluorescence reaction occurs, the fluorescence reaction vessel being formed on the plurality of the photodiodes, with a plurality of photodiodes provided per one fluorescence reaction vessel;

    wherein the fluorescence reaction in the one fluorescence reaction vessel generates fluorescence that enters the plurality of photodiodes and is subjected to the photoelectric conversion, andwherein an excitation-light-entry preventing layer is formed at either or both of a surface portion of the plurality of photodiodes and a position between the plurality of photodiodes and the fluorescence reaction vessel;

    wherein the photodiodes include a high concentration first-conductivity-type semiconductor layer, a second-conductivity-type semiconductor layer, and a low-concentration first-conductivity-type semiconductor layer that are laminated in the stated order from a surface side of the photodiodes, whereinwhen a reverse bias is applied, a part of the high-concentration first-conductivity- type semiconductor layer is not depleted, and the second-conductivity-type semiconductor layer is depleted, andthe high-concentration first-conductivity-type semiconductor layer constitutes the excitation-light-entry preventing layer.

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