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Electrostatically operated micro-optical devices and method for manufacturing thereof

  • US 6,996,306 B2
  • Filed: 08/25/2003
  • Issued: 02/07/2006
  • Est. Priority Date: 08/25/2003
  • Status: Active Grant
First Claim
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1. A micro-optical device comprising:

  • a reflective movable micro-mirror connected with comb finger electrodes and springs via a shuttle beam;

    a set of suspended springs connected with said shuttle beam and with one end anchored onto a substrate;

    a comb drive actuator consists a set of movable comb finger electrodes suspended on a substrate and connected with said shuttle beam, and a set of stationary comb finger electrodes anchored on said substrate; and

    the shuttle beam being movable with respect to the stationary portion of said substrate in response to operation of said comb drive actuator, thereby said micro-mirror is moved by said shuttle beam, wherein the set of suspended springs has a thickness that is less than a thickness of each of the set of movable comb finger electrodes and the set of stationary comb finger electrodes in a perpendicular out-of-plane direction to said substrate of the device.

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