Automated manufacturing system and method for processing photomasks
First Claim
1. An automated system used for manufacturing a photomask comprising a computer readable medium containing instructions, the instruction being executable on a processor to perform the following steps:
- receiving photomask order data in one of a plurality of formats from a photomask customer;
extracting information from said photomask order data;
arranging said extracted information in different formats suitable for specified photomask manufacturing tasks;
storing said extracted and arranged information; and
sending said extracted and arranged information to at least one photomask manufacturing task station.
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Accused Products
Abstract
The present invention relates generally to an automated manufacturing system and method for manufacturing photomasks wherein information provided by a customer at a remote location is interfaced, via a network, to a photomask manufacturer'"'"'s computer system and automatically processes data for manufacturing a photomask and automatically formats and routes data to processing equipment. The present invention reduces the need for manual intervention, thereby avoiding costly delays and transcription errors associated therewith. The software of the present invention provides for automatic generation of data arrays, which can be used to process and monitor the status of a photomask during manufacture. Further, the software is capable of automatically modifying design data provided by a photomask user. Additionally, the software of the present invention includes an automatic messaging system which can notify users of the system, of status and errors in manufacture of photomasks. The present invention also includes a real time monitoring system capable of notifying users of the status and errors in the processing of the photomask during manufacture.
82 Citations
18 Claims
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1. An automated system used for manufacturing a photomask comprising a computer readable medium containing instructions, the instruction being executable on a processor to perform the following steps:
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receiving photomask order data in one of a plurality of formats from a photomask customer; extracting information from said photomask order data; arranging said extracted information in different formats suitable for specified photomask manufacturing tasks; storing said extracted and arranged information; and sending said extracted and arranged information to at least one photomask manufacturing task station. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An automated system used for manufacturing a photomask comprising a computer readable medium containing instructions, the instructions being executable on a processor to perform the following steps:
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receiving photomask order data in one of a plurality of formats from a photomask customer; extracting information from said photomask order data; arranging said extracted information in different formats suitable for specified photomask manufacturing tasks; sending information to at least one manufacturing tool comprising instructions for said at least one manufacturing tool to perform a task associated with the manufacture of said photomask; tracking the status of the at least one processing tool in real time and notifying one or more system users of said status. - View Dependent Claims (16, 17, 18)
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Specification