×

Automated manufacturing system and method for processing photomasks

  • US 6,996,450 B2
  • Filed: 05/24/2004
  • Issued: 02/07/2006
  • Est. Priority Date: 03/14/2002
  • Status: Expired due to Term
First Claim
Patent Images

1. An automated system used for manufacturing a photomask comprising a computer readable medium containing instructions, the instruction being executable on a processor to perform the following steps:

  • receiving photomask order data in one of a plurality of formats from a photomask customer;

    extracting information from said photomask order data;

    arranging said extracted information in different formats suitable for specified photomask manufacturing tasks;

    storing said extracted and arranged information; and

    sending said extracted and arranged information to at least one photomask manufacturing task station.

View all claims
  • 4 Assignments
Timeline View
Assignment View
    ×
    ×