Fluid delivery for scanning probe microscopy

• US 6,998,689 B2
• Filed: 09/09/2003
• Issued: 02/14/2006
• Est. Priority Date: 09/09/2002
• Status: Expired due to Fees

• Current Assignee: Terraspan LLC
• Original Assignee: General Nanotechnology LLC
• Inventors: Kley, Victor B.
• Primary Examiner(s): NOLAND, THOMAS
• Application Number:
  US10/659,737
• Publication Number:
  US 20040118192A1
• Time in Patent Office: 889 Days
• Field of Search: 257/414, 731/05, 250/306, 435/6, 435/287.2, 435/288.4, 435/288.5, 297/00, 137/557, 977/DIG.1, 977/716.H, 977/717.R, 977/710.W, 977/711.C
• US Class Current: 257/414
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: B82Y 99/00 Subject matter not provided for in other groups of this subclass
• CPC Class Codes: G01Q 30/12 Fluid environment
• CPC Class Codes: G01Q 30/14 Liquid environment
• CPC Class Codes: G01Q 60/00 Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
• CPC Class Codes: G01Q 80/00 Applications, other than SPM, of scanning-probe techniques manufacture or treatment of nanostructures B82B3/00; recording or reproducing information using near-field interaction G11B9/12, G11B11/24, G11B13/08
• CPC Class Codes: Y10S 977/849 with scanning probe
• CPC Class Codes: Y10S 977/856 including etching/cutting
• CPC Class Codes: Y10S 977/902 Specified use of nanostructure
• CPC Class Codes: Y10T 29/53 Means to assemble or disassemble

Abstract

The following invention pertains to the introduction of a gas (or fluid) around a SPM probe or nanotool™ to control chemical activity e.g. oxygen to promote oxidation, argon to inhibit oxidation or clean dry air (CDA) to inhibit moisture to control static charging due to the action of the probe or nanotools and to provide vacuum at and around the tip and substrate area. The invention can also produce electrical current for use with active electronic devices on, in or near the body of the device. In addition by use of a fluid like water, certain oils, and other liquids in conjunction with specific tip structure either electric discharge machining can be used at the tip area on the tip itself (in conjunction with a form structure on the work piece) or on a work piece beneath the tip to shape, polish and remove material at very small scales (10 microns to 1 nm or less).

Claims

1. A micro electromechanical systems (MEMS) device comprising:

a scanning probe microscopy (SPM) component;

one or more fluidic channels formed in the SPM component;

one or more control valves to control a flow of fluid in the one or more fluidic channels; and

one or more movable members formed in the SPM component, at least one fluidic channel being formed in each movable member, wherein fluid flow through the at least one fluidic channel produces movement in the movable member.

2. The MEMS device of claim 1 further comprising a cantilever formed in the SPM component and operatively coupled to the moveable members, wherein movement in the movable members serves to move the cantilever.

3. A method for nanomachining using a MEMS device, the MEMs device comprising:

a scanning probe microscopy (SPM) component;

one or more fluidic channels formed in the SPM component;

one or more control valves to control a flow of fluid in the one or more fluidic channels; and

one or more movable members formed in the SPM component, at least one fluidic channel being formed in each movable member, wherein fluid flow through the at least one fluidic channel produces movement in the movable member, the method including using the one or more movable members to perform nanomachining.

4. A micro electromechanical systems (MEMS) device comprising:

a scanning probe microscopy (SPM) component;

at least one fluidic channel formed in the SPM component; and

a venturi tube formed along a portion of the fluidic channel,

wherein a vacuum can be developed by a flow of a gas or fluid through the venturi tube.

5. A micro electromechanical systems (MEMS) device comprising:

a scanning probe microscopy (SPM) component;

one or more movable members formed in the SPM component;

a fluidic channel formed in a first movable member, the fluidic channel configured to deliver fluid to a tip of the SPM component;

one or more control valves formed in the SPM component to control a flow of fluid in the fluidic channel; and

an amount of an isotope disposed along the fluidic channel,

wherein particles emitted by the isotope can be delivered by a fluid flowing in the fluidic channel to the tip to affect charge distribution in a region about the tip.

6. The MEMS device as recited in claim 5 wherein the isotope is Americium 241.

7. The MEMS device as recited in claim 5 wherein the amount of isotope is disposed in a single isotopic region on the SPM device, wherein the single isotopic region contains 1 microcurie or less of radioactivity.

8. The MEMS device of claim 5 wherein the fluid flow comprises one of moving fluid from the fluidic channel formed in the first moveable member to create at least a partial vacuum thereby effecting movement of the first moveable member and moving fluid into the fluidic channel formed in the first moveable member wherein a force of the fluid effects movement of the first moveable member.

9. The MEMS device of claim 5 wherein fluid flow through the at least one fluidic channel produces movement in the first movable member.

10. The MEMS device of claim 9 further comprising a cantilever formed in the SPM component and operatively coupled to the moveable members, wherein a fluidic channel is formed in each moveable member, wherein movement in the movable members serves to move the cantilever.

11. The MEMS device as recited in claim 5 wherein the moveable members act as passive elements.

12. The MEMS device as recited in claim 5 wherein the moveable members produce electrical signals during movement, wherein the electrical signals serve to control subsequent movements.

13. The MEMS device as recited in claim 12 wherein the electrical signals serve to obtain one of a predetermined motion of a first moveable member, a predetermined displacement of the first moveable member, a zero displacement position of the first moveable member.

14. The MEMS device as recited in claim 5 further comprising a circuit for monitoring changes in charge accumulation in the fluidic channel as the isotope is moved by fluid flow.

15. A method for performing nanomachining on a workpiece using a MEMs device, the MEMs device comprising:

a scanning probe microscopy (SPM) component;

one or more movable members formed in the SPM component;

a fluidic channel formed in a first movable member, the fluidic channel configured to deliver fluid to a tip of the SPM component;

one or more control valves formed in the SPM component to control a flow of fluid in the fluidic channel; and

an amount of an isotope disposed along the fluidic channel,

wherein particles emitted by the isotope can be delivered by a fluid flowing in the fluidic channel to the tip to affect charge distribution in a region about the tip, wherein the particles are delivered to the tip, the method including using the tip to perform nanomachining on a workpiece.

16. A method of performing a nanomachining operation comprising manipulating a device relative to a surface, including constraining motion of the device in a specific or constrained region,

the device comprising:

a scanning probe microscopy (SPM) component;

one or more movable members formed in the SPM component;

a fluidic channel formed in a first movable member, the fluidic channel configured to deliver fluid to a tip of the SPM component;

one or more control valves formed in the SPM component to control a flow of fluid in the fluidic channel; and

an amount of an isotope disposed alone the fluidic channel,

wherein particles emitted by the isotope can be delivered by a fluid flowing in the fluidic channel to the tip to affect charge distribution in a region about the tip.

17. A method as in claim 16 in which the nanomachining operation uses chemical or biological chips or devices in which material therefore is placed in wells in a regular arrangement on a plane or surface(s).

18. A method as in claim 17 in which the material is DNA which has been marked optically, electrically or chemically so as to interact with optical, electrical or chemical detectors or emitters associated with or integrated in the device.

19. A method for nanoelectric discharge machining using a MEMS device, the method comprising imaging a surface to be machined and measuring surface features of the surface to be machined, the imaging and measuring being performed using a scanning probe microscopy technique

the MEMs device comprising:

a scanning probe microscopy (SPM) component;

one or more movable members formed in the SPM component;

a fluidic channel formed in a first movable member, the fluidic channel configured to deliver fluid to a tip of the SPM component;

one or more control valves formed in the SPM component to control a flow of fluid in the fluidic channel; and

an amount of an isotope disposed alone the fluidic channel,

wherein particles emitted by the isotope can be delivered by a fluid flowing in the fluidic channel to the tip to affect charge distribution in a region about the tip.

20. A micro electromechanical systems (MEMS) device comprising:

a scanning probe microscopy (SPM) component;

a fluidic channel formed in the SPM component, the fluidic channel configured to deliver fluid to a tip of the SPM component;

an amount of an isotope disposed along the fluidic channel, wherein particles emitted by the isotope can be delivered by a fluid flowing in the fluidic channel to the tip to affect charge distribution in a region about the tip; and

a circuit for monitoring changes in charge accumulation in the fluidic channel as the isotope is moved by a flow of fluid.