Component operating with bulk acoustic waves and a method for producing the component
First Claim
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1. A component operating with bulk acoustic waves, said component comprising:
- a carrier substrate;
a lower electrode that faces said carrier substrate;
an upper electrode;
a piezoelectric layer between said lower electrode and said upper electrode, said piezoelectric layer comprising a multi-layer assembly; and
an acoustic mirror between said carrier substrate and said lower electrode, said acoustic mirror comprising at least one layer with a high acoustic impedance and at least one layer with low acoustic impedance arranged in a stack, said at least one layer of low acoustic impedance including an uppermost mirror layer of said stack, said at least one layer with high acoustic impedance being formed as a structured layer, said uppermost mirror layer exhibiting a varying thickness, an upper boundary surface of said uppermost mirror layer being planar to said lower electrode, and said uppermost layer enclosing a structure of said structured layer and forming a seal with a layer of said at least one layer with a low acoustic impedance or with said carrier substrate outside of an area covered by said structure.
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Abstract
A component operating with bulk acoustic waves has a carrier substrate, a thin-film resonator and an acoustic mirror arranged between the resonator and carrier substrate. The acoustic mirror is formed by at least one high acoustic impedance layer, which is covered by a low acoustic impedance layer and the uppermost low impedance acoustic layer is planarized to form a flat planar surface on which the thin-film resonator is formed.
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Citations
20 Claims
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1. A component operating with bulk acoustic waves, said component comprising:
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a carrier substrate; a lower electrode that faces said carrier substrate; an upper electrode; a piezoelectric layer between said lower electrode and said upper electrode, said piezoelectric layer comprising a multi-layer assembly; and an acoustic mirror between said carrier substrate and said lower electrode, said acoustic mirror comprising at least one layer with a high acoustic impedance and at least one layer with low acoustic impedance arranged in a stack, said at least one layer of low acoustic impedance including an uppermost mirror layer of said stack, said at least one layer with high acoustic impedance being formed as a structured layer, said uppermost mirror layer exhibiting a varying thickness, an upper boundary surface of said uppermost mirror layer being planar to said lower electrode, and said uppermost layer enclosing a structure of said structured layer and forming a seal with a layer of said at least one layer with a low acoustic impedance or with said carrier substrate outside of an area covered by said structure. - View Dependent Claims (2, 3, 4, 5)
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6. A component operating with bulk acoustic waves, said component comprising:
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a carrier substrate; a lower electrode that faces said carrier substrate; an upper electrode; a piezoelectric layer between said lower electrode and said upper electrode; an acoustic mirror between said carrier substrate and said lower electrode, said acoustic mirror comprising at least one layer with a high acoustic impedance and at least one layer with low acoustic impedance arranged in a stack, said at least one layer of low acoustic impedance including an uppermost mirror layer of said stack, said at least one layer with high acoustic impedance being formed as a structured said uppermost mirror layer exhibiting a varying thickness, an upper boundary surface of said uppermost mirror layer being planar to said lower electrode, and said uppermost layer enclosing structures of said structured layer and forming a seal with a layer of said at least one layer with a low acoustic impedance or with said carrier substrate outside of an area covered by said structure; an additional piezoelectric layer being formed on said upper electrode and an additional electrode on said additional piezoelectric layer; at least a partially permeable coupling layer between said upper electrode and said additional piezoelectric layer; and a second additional electrode between said at least a partially permeable coupling layer and said additional piezoelectric layer. - View Dependent Claims (7, 8, 9, 10)
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11. A component operating with bulk acoustic waves, said component comprising:
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a carrier substrate; a lower electrode that faces said carrier substrate; an upper electrode; a piezoelectric layer between said lower electrode and said upper electrode; and an acoustic mirror between said carrier substrate and said lower electrode, said acoustic mirror comprising at least one layer with a high acoustic impedance and at least one layer with low acoustic impedance arranged in a stack, said at least one layer of low acoustic impedance including an uppermost mirror layer of said stack, said at least one layer with high acoustic impedance being formed as a structured said uppermost mirror layer exhibiting a varying thickness, an upper boundary surface of said uppermost mirror layer being planar to said lower electrode, and said uppermost layer enclosing structures of said structured layer and forming a seal with a layer of said at least one layer with a low acoustic impedance or with said carrier substrate outside of an area covered by said structure said carrier substrate including a plurality of dielectric layers with at least one metallized plane being provided between successive ones of said dielectric layers. - View Dependent Claims (12, 13, 14, 15)
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16. A method to produce a component operating with bulk acoustic waves, said method comprising the steps of:
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providing a carrier substrate; forming an acoustic mirror on the carrier substrate by depositing a layer with a high acoustic impedance on the carrier substrate; structuring the layer of high acoustic impedance to form a structured layer; depositing an uppermost mirror layer with a low acoustic impedance on the structured layer; thinning and planarizing an upper surface of the uppermost mirror layer to form a planar surface; forming a lower electrode on the planar surface; forming a structured piezoelectric layer on the lower electrode; and then forming an upper electrode on the structured piezoelectric layer. - View Dependent Claims (17, 18, 19, 20)
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Specification