Optical apparatus
First Claim
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1. An optical apparatus that measures a characteristic of an optical element, said optical apparatus comprising:
- a polarizer configured to emit predetermined linearly polarized light to be incident upon the optical element by reflecting, at least three times, non-polarized light incident upon said polarizer in an extreme ultraviolet region or an X-ray region;
a driving mechanism configured to rotate said polarizer around a predetermined rotational axis, said driving mechanism enabling said polarizer to form two linearly polarized lights having two polarized directions that are orthogonal to each other; and
a detector configured to receive light from the optical element,wherein the incident light that is incident upon said polarizer and outgoing light that is emitted from said polarizer travel along the rotating axis.
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Abstract
An optical apparatus that measures a polarization dependent characteristic of a measured object includes a light source for emitting non-linearly polarized light in an extreme ultraviolet region or an X-ray region, and a rotary polarizer for reflecting the light emitted from the light source, the polarizer including a set of mirrors repeating three or more reflections and being arranged such that an optical axis of incident light and that of outgoing light are aligned with the same straight line.
28 Citations
16 Claims
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1. An optical apparatus that measures a characteristic of an optical element, said optical apparatus comprising:
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a polarizer configured to emit predetermined linearly polarized light to be incident upon the optical element by reflecting, at least three times, non-polarized light incident upon said polarizer in an extreme ultraviolet region or an X-ray region; a driving mechanism configured to rotate said polarizer around a predetermined rotational axis, said driving mechanism enabling said polarizer to form two linearly polarized lights having two polarized directions that are orthogonal to each other; and a detector configured to receive light from the optical element, wherein the incident light that is incident upon said polarizer and outgoing light that is emitted from said polarizer travel along the rotating axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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- 13. An optical element whose a characteristic is measured by using an optical apparatus that measures characteristics of said optical element, the optical apparatus comprising a polarizer configured to emit predetermined linearly polarized light to be incident upon the optical element by reflecting, at least three times, non-polarized light incident upon said polarizer in an extreme ultraviolet region or an X-ray region a driving mechanism configured to rotate said polarizer around a predetermined rotational axis, said driving mechanism enabling said polarizer to form two linearly polarized lights having two polarized directions that are orthogonal to each other, and a detector configured to receive light from the optical element, wherein the incident light that is incident upon said polarizer and outgoing light that is emitted from said polarizer travel along the rotating axis.
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15. An exposure apparatus for irradiating exposure light to a target via an optical system including an optical element whose a characteristic is measured by using an optical apparatus that measures characteristics of said optical element, the optical apparatus comprising a polarizer configured to emit predetermined linearly polarized light to be incident upon the optical element by reflecting, at least three times, non-polarized light incident upon said polarizer in an extreme ultraviolet region or an X-ray region a driving mechanism configured to rotate said polarizer around a predetermined rotational axis, said driving mechanism enabling said polarizer to form two linearly polarized lights having two polarized directions that are orthogonal to each other, and a detector configured to receive light from the optical element, wherein the incident light that is incident upon said polarizer and outgoing light that is emitted from said polarizer travel along the rotating axis, the characteristic measured being more than a specified value.
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16. A device fabricating method comprising the steps of:
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exposing a target using an exposure apparatus that irradiates exposure light to an object to be exposed via an optical system including an optical element whose a characteristic is measured by using an optical apparatus that measures characteristics of said optical element, the optical apparatus comprising a polarizer configured to emit predetermined linearly polarized light to be incident upon the optical element by reflecting, at least three times, non-polarized light incident upon said polarizer in an extreme ultraviolet region or an X-ray region a driving mechanism configured to rotate said polarizer around a predetermined rotational axis, said driving mechanism enabling said polarizer to form two linearly polarized lights having two polarized directions that are orthogonal to each other, and a detector configured to receive light from the optical element, wherein the incident light that is incident upon said polarizer and outgoing light that is emitted from said polarizer travel along the rotating axis, the characteristic measured being more than specified values; and performing a predetermined process for the target exposed.
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Specification