Method and apparatus for improved focus ring

• US 7,001,482 B2
• Filed: 11/12/2003
• Issued: 02/21/2006
• Est. Priority Date: 11/12/2003
• Status: Expired due to Fees

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Fink, Steven T, Landis, Michael
• Primary Examiner(s): Vo, Tuyet Thi
• Application Number:
  US10/705,221
• Publication Number:
  US 20050099135A1
• Time in Patent Office: 832 Days
• Field of Search: 156/345, 156/345.55, 156/345.54, 156/345.51, 204/298, 204/298.28, 204/298.23, 118/715, 118/723, 118/730, 118/729, 118/728, 315/111.71, 315/111
• US Class Current: 156/345.55
• CPC Class Codes: H01J 37/32642 Focus rings

Abstract

A focus ring assembly, configured to be coupled to a substrate holder in a plasma processing system, comprises a focus ring having one or more wear indicators for determining the lifetime of the focus ring, wherein the coupling of the focus ring to the substrate holder facilitates auto-centering of the focus ring in the plasma processing system. For example, a centering ring mounted on the substrate holder can comprise a centering feature configured to couple with a mating feature on the focus ring.

Claims

1. A focus ring assembly for surrounding a substrate on a substrate holder in a plasma processing system comprising:

a centering ring configured to be coupled to said substrate holder; and

a focus ring comprising an upper surface, a lower surface, and one or more wear indicators coupled to at least one of said upper surface and said lower surface, wherein said focus ring is configured to be centered about said substrate by coupling said focus ring to said centering ring.

2. A disposable focus ring for surrounding a substrate on a substrate holder in a plasma processing system comprising:

a ring configured to be coupled to said substrate holder comprising an upper surface, a lower surface, and one or more wear indicators coupled to at least one of said upper surface and said lower surface,

wherein said ring is configured to be centered about said substrate by coupling said ring to said substrate holder, and

wherein said one or more wear indicators comprise a hole in said upper surface or lower surface and extending to a depth from said upper surface or said lower surface, said depth comprising a fraction of the distance between said upper surface and said lower surface.

3. A method of replacing a focus ring surrounding a substrate on a substrate holder in a plasma processing system comprising:

removing a first focus ring from said plasma processing system; and

installing a second focus ring in said plasma processing system by coupling said second focus ring to said substrate holder, said coupling facilitating auto-centering of said second focus ring in said plasma processing system,

wherein said first focus ring and said second focus ring each comprise an upper surface, a lower surface, and one or more wear indicators coupled to at least one of said upper surface and said lower surface, and

wherein said one or more wear indicators comprise a hole in said upper surface or lower surface and extending to a depth from said upper surface or said lower surface, said depth comprising a fraction of the distance between said upper surface and said lower surface.

4. A focus ring assembly for surrounding a substrate on a substrate holder in a plasma processing system comprising:

a centering ring configured to be coupled to said substrate holder; and

a focus ring comprising an upper surface, a lower surface, and one or more wear indicators coupled to at least one of said upper surface and said lower surface, wherein said focus ring is configured to be centered about said substrate by coupling said focus ring to said centering ring,

wherein said centering ring is coupled to said substrate holder by at least one of said centering ring resting atop said substrate holder, said centering ring being mechanically clamped to said substrate holder, and said centering ring being electrically clamped to said substrate holder.

5. The focus ring assembly of claim 4, wherein said focus ring is made from at least one of silicon, quartz, silicon carbide, silicon nitride, amorphous carbon, alumina, sapphire, polyimide, and Teflon.

6. The focus ring assembly of claim 4, wherein said one or more wear indicators comprises a hole in said upper surface and extending to a depth from said upper surface, said depth comprising a fraction of the distance between said upper surface and said lower surface.

7. The focus ring assembly of claim 4, wherein said one or more wear indicators comprise a hole in said lower surface and extending to a depth from said lower surface, said depth comprising a fraction of the distance between said upper surface and said lower surface.

8. The focus ring assembly of claim 6 or 7 wherein said depth for each of said one or more wear indicators varies from one wear indicator to another wear indicator.

9. The focus ring assembly of claim 4, wherein said centering ring comprises a centering feature configured to center said focus ring on said centering ring.

10. The focus ring assembly of claim 9, wherein said centering feature comprises at least one of a centering pin, a centering receptacle, and a centering edge.

11. The focus ring assembly of claim 9, wherein said focus ring comprises a mating feature configured to be coupled with said centering feature.

12. The focus ring assembly of claim 11, wherein said mating feature comprises at least one of a centering pin, a centering receptacle, and a centering edge.

13. The focus ring assembly of claim 4, wherein said centering ring is made from at least one of aluminum, coated aluminum, silicon, silicon carbide, silicon nitride, amorphous carbon, alumina, sapphire, polyimide, and Teflon.

14. The focus ring assembly of claim 13, wherein said centering ring is made from coated aluminum and comprises at least one of surface anodization, a plasma electrolytic oxidation coating, and a spray coating.

15. The focus ring assembly as recited in claim 13, wherein said centering ring is made from coated aluminum and comprises a coating having at least one of III-column element and a Lanthanon element.

16. The focus ring assembly as recited in claim 13, wherein said centering ring is made from coated aluminum and comprises a coating having at least one of Al₂O₃, Yttria (Y₂O₃), Sc₂O₃, Sc₂F₃, YF₃, La₂O₃, CeO₂, Eu₂O₃, and DyO₃.