X-ray imaging device

• US 7,002,155 B2
• Filed: 02/05/2004
• Issued: 02/21/2006
• Est. Priority Date: 02/06/2003
• Status: Expired due to Fees

• Current Assignee: Hamamatsu Photonics KK
• Original Assignee: Hamamatsu Photonics KK
• Inventors: Miyaguchi, Kazuhisa, Miyata, Emi
• Primary Examiner(s): Porta, David
• Assistant Examiner(s): BOOSALIS, FANI POLYZOS
• Application Number:
  US10/771,462
• Publication Number:
  US 20040155198A1
• Time in Patent Office: 747 Days
• Field of Search: 250/370.11, 250/370.08, 250/370.09, 250/362, 250/363.01, 250/370.12, 250/504.R, 378/43, 378/37, 378/87
• US Class Current: 250/370.11
• CPC Class Codes: G01T 1/2006 using a combination of a scintillator and photodetector which measures the means radiation intensity

Abstract

The X-ray imaging device comprises an imaging portion having sensitivity to X-ray with a predetermined energy range and to visible light with a predetermined wavelength range and picking up images of X-ray and visible light and a scintillator to emit visible light with predetermined wavelength range by absorbing X-ray with a higher energy range than a predetermined energy range. The imaging portion is arranged corresponding to a surface of X-ray incidence. The scintillator is formed on an opposite surface to the surface of X-ray incidence across the imaging portion in a direction of X-ray incidence.

Claims

1. An X-ray imaging device, comprising:

an imaging portion arranged corresponding to a surface of X-ray incidence, having sensitivity to X-ray with a predetermined energy range and to visible light with a predetermined wavelength range and picking up images of X-ray and visible light; and

a scintillator arranged on an opposite surface to said surface of X-ray incidence across said imaging portion in a direction of X-ray incidence, emitting visible light with said predetermined wavelength range by absorbing X-ray with a higher energy range than said predetermined energy range.

2. The X-ray imaging device according to claim 1, wherein

said imaging portion is formed on said opposite surface to said surface of X-ray incidence on a semiconductor substrate;

and

said scintillator is arranged on said opposite surface of said semiconductor substrate so as to cover at least said imaging portion.

3. The X-ray imaging device according to claim 2, wherein

said semiconductor substrate is thinned at an area corresponding to said imaging portion.

4. The X-ray imaging device according to claim 1, wherein

said imaging portion is formed on said surface of X-ray incidence on a semiconductor substrate;

and

said scintillator is arranged on said opposite surface to said surface of X-ray incidence on said semiconductor substrate so as to cover at least an area corresponding to said imaging portion.

5. The X-ray imaging device according to claim 4, wherein

said semiconductor substrate is thinned at an area corresponding to said imaging portion.

6. The X-ray imaging device according to claim 1, wherein

said imaging portion includes a plurality of imaging elements arrayed two-dimensionally.

7. The X-ray imaging device according to claim 1, wherein

said scintillator contains Bi₄Ge₃O₁₂.

8. The X-ray imaging device according to claim 1, wherein

said scintillator contains CsI.

9. The X-ray imaging device according to claim 1, wherein

said scintillator contains Gd₂O₂S.

10. The X-ray imaging device according to claim 1, wherein

a reflective film to reflect visible light with said predetermined wavelength range is provided behind said scintillator in the direction of X-ray incident.

11. An X-ray imaging device, comprising:

an imaging portion formed on an opposite surface to a surface of X-ray incidence on a semiconductor substrate, having sensitivity to X-ray with a predetermined energy range and to visible light with a predetermined wavelength range and picking up images of X-ray and visible light; and

a scintillator arranged on the opposite surface of said semiconductor substrate so as to cover said imaging portion, emitting visible light with said predetermined wavelength range by absorbing X-ray with a higher energy range than said energy range.

12. An X-ray imaging device, comprising:

an imaging portion formed on a surface of X-ray incidence on a semiconductor substrate, having sensitivity to X-ray with a predetermined energy range and to visible light with a predetermined wavelength range and picking up images of said X-ray and said visible light; and

a scintillator arranged on an opposite surface to said surface of X-ray incidence on said semiconductor substrate so as to cover at least an area corresponding to said imaging portion, emitting visible light with said predetermined wavelength range by absorbing X-ray with a higher energy range than said-predetermined energy range.