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Apparatus for beam deflection

  • US 7,002,717 B1
  • Filed: 11/20/2000
  • Issued: 02/21/2006
  • Est. Priority Date: 11/24/1999
  • Status: Expired due to Term
First Claim
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1. An apparatus for beam deflection, in particular for scanning microscopy, comprises:

  • a first mirror arrangement for deflecting a light beam; and

    a rotary drive (1) for alternatingly rotating the first mirror arrangement,wherein the rotary drive (1) has two mutually independent drive units (2, 3) for rotating the first mirror arrangement (4), together or mutually independently, about a rotation axis (5) defined by said rotary drive (1).

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