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Micromirror having reduced space between hinge and mirror plate of the micromirror

  • US 7,002,726 B2
  • Filed: 01/11/2005
  • Issued: 02/21/2006
  • Est. Priority Date: 07/24/2003
  • Status: Expired due to Term
First Claim
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1. A spatial light modulator, comprising:

  • an array of movable mirror plates held on a substrate, each mirror plate being attached to a hinge that is supported by a hinge structure such that the minor plate can rotate relative to a substrate, on which the hinge structure is formed; and

    wherein the hinge and the mirror plate are spaced apart from 0.15 to 0.45 micrometers in a direction perpendicular to the substrate and wherein each mirror plate has an area; and

    wherein a ratio of a summation of all areas of the mirror plates to an area of the substrate is 90 percent or more.

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