Method of cooling semiconductor die using microchannel thermosyphon
First Claim
1. A method of cooling a semiconductor die, comprising the steps of:
- flowing fluid through micro-channels formed into the die;
communicating fluid from the die to a condenser arranged above the die;
cooling fluid at the condenser; and
communicating fluid from the condenser to the micro-channels.
3 Assignments
0 Petitions
Accused Products
Abstract
The invention provides for cooling a semiconductor die. The die has plurality of micro-channels. A condenser is in fluid communication with the micro-channels such that the die heats vaporizes fluid at the die to force fluid towards the condenser, and such that gravity pressurizes cooler condenser fluid towards the die. A semiconductor plate such as glass may couple with the die to seal the micro-channels and to form a plurality of fluid conduits for the fluid. Generally, the fluid is alcohol. A first fluid conduit and a second fluid conduit couple between the die'"'"'s micro-channels and the condenser to form a closed loop thermosyphon system. The condenser is preferably constructed and arranged above the die such that gravity forces cooler fluid to the micro-channels. The micro-channels may be shaped for preferential fluid flow along one direction of the die. The condenser may contain fins to enhance heat transfer to air adjacent the condenser.
34 Citations
6 Claims
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1. A method of cooling a semiconductor die, comprising the steps of:
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flowing fluid through micro-channels formed into the die; communicating fluid from the die to a condenser arranged above the die; cooling fluid at the condenser; and communicating fluid from the condenser to the micro-channels. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification