Composite sensor device and method of producing the same

• US 7,004,025 B2
• Filed: 06/21/2001
• Issued: 02/28/2006
• Est. Priority Date: 06/23/2000
• Status: Expired due to Fees

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: Tamura, Masaya
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US09/886,667
• Publication Number:
  US 20020051258A1
• Time in Patent Office: 1,713 Days
• Field of Search: 735/143.2, 735/142.9, 735/10, 735/11, 735/041.2, 735/041.4, 735/041.5, 735/040.4
• US Class Current: 73/511
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/025 Inertial sensors not provided for in B81B2201/0235 - B81B2201/0242
• CPC Class Codes: B81B 7/0041 maintaining a controlled atmosphere with techniques not provided for in B81B7/0038
• CPC Class Codes: B81B 7/02 containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] B81B7/04 takes precedence
• CPC Class Codes: B81C 2203/0145 Hermetically sealing an opening in the lid
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01P 1/02 Housings
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type

Abstract

A plane vibrator of an angular velocity sensor and a movable member of an acceleration sensor are provided in a spaced floating state on the same substrate. A lid is formed so as to cover and be spaced from the upper side of the plane vibrator and the movable member. A space defined by the substrate and the lid is sectioned into a angular velocity sensor space and an acceleration sensor space by use of a sectioning wall. The angular velocity sensor space is hermetically sealed to be in the vacuum state. The acceleration sensor space is hermetically sealed to be under atmospheric pressure. The plane vibrator is vibrated at a high frequency and a large amplitude so that the angular velocity detection sensitivity is enhanced. The movable member, even if vibration of the plane vibrator is transmitted thereto, is prevented from vibrating at a high frequency and a large amplitude, due to the damping effect of air. Thus, the acceleration detection sensitivity is enhanced.

Claims

1. A composite sensor device including an angular velocity sensor and an acceleration sensor comprising:

a substrate;

a displacement portion forming member disposed on the substrate, the displacement portion forming member including a vibrator for an angular velocity sensor, to be vibrated and displaced by a Coriolis force caused by an angular velocity and a movable member for an acceleration sensor, to be movably displaced by application of an acceleration, the vibrator and the movable member being spaced from each other; and

a lid disposed on an upper side of the displacement portion forming member to cover and be spaced from the vibrator of the angular velocity sensor and the movable member of the acceleration sensor;

wherein

the substrate, the displacement portion forming member and the lid, define a space for accommodating and sealing the vibrator of the angular velocity sensor and the movable member of the acceleration sensor, in such a manner that the vibrator and the movable member can be vibrated, the space being sectioned into an angular velocity sensor space for accommodating and sealing the vibrator of the angular velocity sensor and an acceleration sensor space for accommodating and sealing the movable member of the acceleration sensor which is not communicated with the angular velocity sensor space,

the angular velocity sensor space is sealed in a vacuum state in which the vibrator of the angular velocity sensor can be vibrated at a high frequency in the kHz range or greater and at an amplitude that is greater than a desired value;

the acceleration sensor space is sealed in an atmospheric pressure state for preventing high-frequency vibrations in which the movable member of the acceleration sensor can be vibrated at a low frequency of 100 Hz or less, and the movable member of the acceleration sensor is prevented from vibrating at a high frequency in the kHz range or greater and at an amplitude that is greater than the desired value even when vibrations of the vibrator of the angular velocity sensor are transmitted to the movable member of the acceleration sensor;

the angular velocity sensor and the acceleration sensor have constant potential sites so that the sensors are maintained at set constant potentials, respectively, said constant potential site of the angular velocity sensor being electrically connected to the constant potential site of the acceleration sensor; and

a connection electrode is arranged to connect both of the constant potential site of the angular velocity sensor and the constant potential site of the acceleration sensor to an external circuit.

2. A composite sensor device according to claim 1, wherein a damping agent fills the acceleration sensor space.

3. A composite sensor device according to any one claims 1, wherein the substrate is an SOI substrate comprising a supporting layer, an oxide layer, and an active layer laminated together, and the displacement portion forming member is made from the active layer of the SOI substrate.