Pressure sensor and method of making the same having membranes forming a capacitor
First Claim
Patent Images
1. A pressure sensor comprising:
- a first membrane that flexes in response to pressure;
a reference cavity covered by said first membrane, said reference cavity containing a vacuum; and
a second membrane adjacent to said first membrane;
wherein said second membrane is not in contact with said vacuum; and
wherein said first and second membranes form a capacitor having a capacitance that varies in accordance with the flexing of said first membrane and said pressure.
1 Assignment
0 Petitions
Accused Products
Abstract
A pressure sensor may include a first membrane that flexes in response to pressure, a reference cavity covered by the first membrane where the reference cavity contains a vacuum and a second membrane, adjacent to the first membrane, the first and second membranes forming a capacitor having a capacitance that varies in accordance with the flexing of the first membrane and the pressure.
-
Citations
20 Claims
-
1. A pressure sensor comprising:
-
a first membrane that flexes in response to pressure; a reference cavity covered by said first membrane, said reference cavity containing a vacuum; and a second membrane adjacent to said first membrane; wherein said second membrane is not in contact with said vacuum; and wherein said first and second membranes form a capacitor having a capacitance that varies in accordance with the flexing of said first membrane and said pressure. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A pressure sensor comprising:
-
a first means for flexing in response to pressure; a reference cavity covered by said first means, said reference cavity containing a vacuum; a second means for forming a capacitor with said first means, said capacitor having a capacitance that varies in accordance with the flexing of said first means and said pressure; and means for measuring said capacitance; wherein said second means is adjacent to said first means and not exposed to said vacuum within said reference cavity. - View Dependent Claims (9, 10, 11)
-
-
12. A pressure sensor comprising:
-
a first membrane that flexes in response to pressure; a reference cavity covered by said first membrane, said reference cavity containing a vacuum; and a second membrane adjacent to said first membrane, said first and second membranes forming a capacitor having a capacitance that varies in accordance with the flexing of said first membrane and said pressure; wherein one of said membranes is formed with a curvature with respect to the other said membrane. - View Dependent Claims (13)
-
-
14. A pressure sensor comprising:
-
a first membrane that flexes in response to pressure; a reference cavity covered by said first membrane, said reference cavity containing a vacuum; and a second membrane adjacent to said first membrane; wherein said reference cavity and said second membrane are disposed on opposite sides of said first membrane, said first and second membranes forming a capacitor having a capacitance that varies in accordance with the flexing of said first membrane and said pressure. - View Dependent Claims (15, 16, 17, 18, 19, 20)
-
Specification