Pendulum valve with a full range of position control

• US 7,004,453 B1
• Filed: 09/12/2001
• Issued: 02/28/2006
• Est. Priority Date: 04/25/2001
• Status: Expired due to Fees

• Current Assignee: Brooks Instrument LLC (Illinois Tool Works Inc.)
• Original Assignee: Mykrolis Corporation (Entegris Incorporated)
• Inventors: Cheng, Shiyuan (Denny)
• Primary Examiner(s): KEASEL, ERIC S
• Application Number:
  US09/952,083
• Time in Patent Office: 1,630 Days
• Field of Search: 251/129.15, 251/158, 251/161, 251/205, 251/206, 251/208, 251/298, 251/301, 251/302, 251/229, 251/167, 251/193, 251/195, 251/84, 251/87, 251/88, 251/160, 251/169, 251/176, 251/177, 251/178, 251/180, 251/187, 251/188, 251/192, 251/196, 251/211, 137/614.13, 137/614.14, 137/637.3, 137/637.5, 137/613, 137/637, 137/637.2, 137/637.4
• US Class Current: 251/211
• CPC Class Codes: F16K 3/06 in the form of closure plates arranged between supply and discharge passages F16K3/10 takes precedence
• CPC Class Codes: F16K 3/10 with special arrangements for separating the sealing faces or for pressing them together
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

Embodiments of the present invention provide a pendulum valve with a full range of normal position control. The pendulum valve can include a valve housing having a flow channel, and a valve body that is movable within the valve housing between a fully open position and at least one closed position. The pendulum valve can also include an electrical control mechanism operable to position the valve body in any one of a range of partially open positions.

Claims

1. A valve with a full range of position control comprising:

a valve housing defining a flow channel;

a valve body movable within the valve housing from a fully open position to a position approximately axially aligned with the flow channel; and

a linear control mechanism operable to move the valve body along the flow channel in approximately a straight line from a first fully closed position to a second fully closed position and position the valve body along the flow channel in the first fully closed position, the second fully closed position and any partially opened position between the first fully closed position and the second fully closed position.

2. The valve of claim 1, wherein the valve body is rotatable about a primary axis of rotation approximately parallel to a direction of movement of the valve body along the flow channel to move from the fully open position to the position approximately axially aligned with the flow channel and wherein the linear control mechanism imparts a force at approximately the primary axis of rotation to move the valve body along the flow channel.

3. The valve of claim 1, further wherein the valve body further comprises:

a valve frame;

a valve plate mounted to the valve frame, wherein the valve plate is rotatable about an axis of rotation lying in a plane generally orthogonal to the flow channel.

4. The valve of claim 3, wherein the valve plate is mounted to the valve frame at approximately the centerline for the valve plate with a rotatable coupling.

5. The valve of claim 1, wherein the valve body comprises:

a valve plate comprising;

a first side;

a second side obverse to the first side; and

wherein, when the valve body is in the first fully closed position the first side of the valve plate seals with the valve housing to close the flow channel and when the valve body is in the second fully closed position, the second side of the valve plate seals with the valve housing to close the flow channel.

6. The valve of claim 1, wherein the first fully closed position is an inlet-side position and the second fully-closed position is an outlet-side position.

7. The valve of claim 1, wherein the linear control mechanism further comprises a solenoid contacting a thrust shaft and wherein the solenoid imparts a force to the valve body via the thrust shaft.

8. The valve of claim 1, wherein the linear control mechanism further comprises a linear actuator contacting a thrust shaft and wherein the linear actuator imparts a force to the valve body via the thrust shaft.

9. The valve of claim 1, wherein the valve housing further comprises:

a first housing portion; and

a second housing portion defining the flow channel removably coupled to the first housing portion; and

wherein the linear control mechanism is mounted to the first housing portion.

10. A pendulum valve comprising:

a valve housing defining a flow channel; and

a valve body movable about a primary axis of rotation between a fully opened position and a position generally axially aligned with the flow channel;

a linear control mechanism to impart a force to the valve body at approximately the primary axis of rotation to move the valve body along the flow channel in a from a first fully closed position to a second fully-closed position and to any partially opened position between a first fully closed position and a second fully closed position, the valve body further comprising

a valve frame;

a valve plate mounted to the valve frame having a first side and a second side obverse from the first side; and

wherein the valve plate is rotatable about an axis of rotation lying in a plane generally orthogonal to the flow channel and wherein the first side of the valve plate seals with the valve housing in the first fully closed position and the second side seals with the valve housing in the second fully closed position.

11. The pendulum valve of claim 10, wherein the valve body further comprises a rotatable coupling mounting the valve plate to the valve frame at approximately a centerline of the valve plate.

12. The pendulum valve of claim 10, wherein the valve plate further comprises:

a first annular groove one the first side of the valve plate;

a first o-ring at least partially located in the first annular groove;

a second annular groove on the second side of the valve plate;

a second o-ring at least partially located in the second annular groove;

wherein when the valve body is in the first fully closed position the first o-ring contacts the valve housing to form a seal; and

wherein when the valve body is in the second fully closed position the second o-ring contacts the valve housing to form a seal.

13. A pendulum valve with a full range of normal position control comprising:

a valve housing further comprising;

a first housing portion; and

a second housing portion defining a flow channel removably coupled to the first housing portion;

a valve body movable within the valve housing from a fully opened position to a position generally axially aligned with the flow channel;

a thrust shaft connected to the valve body;

a drive shaft at least partially mounted within the first housing portion defining a primary axis of rotation operable to rotate the thrust shaft to move the valve body generally perpendicular to the flow channel to the position approximately axially aligned with the flow channel;

a drive mechanism mounted to the first housing portion operable to rotate the drive shaft; and

a linear control mechanism mounted to the first housing portion operable to move the thrust shaft to move the valve body along the flow channel from a first fully closed position to a second fully closed position and position the valve body in the first fully closed position, the second fully closed position and any partially opened position between the first fully closed position and the second fully closed position.

14. The pendulum valve of claim 13, wherein the flow channel has an inlet inline with an outlet.

15. The pendulum valve of claim 14, wherein the valve body further comprises:

a valve frame;

a valve plate mounted to the valve frame by a rotatable coupling, wherein the valve plate rotates about an axis of rotation lying in a plane generally orthogonal to the flow channel to self-seal in the first fully closed position and the second fully closed position.

16. A pendulum valve with a full range of position control comprising:

a valve housing defining a flow channel having a first housing portion and a second housing portion;

a valve body movable in the valve housing;

a thrust shaft at least partially located in the first housing portion; and

a linear control mechanism mounted to the first housing portion operable to move a thrust shaft to move the valve body along the flow channel in approximately a straight line from a first fully closed position to a second fully closed position and position the valve body in any partially opened position between the first fully closed position and the second fully closed position.

17. The pendulum valve of claim 16, wherein the flow channel has an inlet inline with an outlet.

18. The pendulum valve of claim 16, wherein the valve body further comprises:

a valve frame;

a valve plate mounted to the valve frame by a rotatable coupling, wherein the valve plate rotates about an axis of rotation lying in a plane generally orthogonal to the flow channel to self-seal in the first fully closed position and the second fully closed position.

19. A pendulum valve comprising:

a valve housing defining a flow channel; and

a valve body movable about a primary axis of rotation between a fully opened position and a position generally axially aligned with the flow channel;

a linear control mechanism to impart a force at approximately the primary axis of rotation to move the valve body along the flow channel to a first fully closed position, a second fully closed position, a plurality of partially opened positions between the first fully closed position and the second fully closed position, wherein the primary axis of rotation is approximately parallel to a direction of movement of the valve body along the flow channel, the valve body further comprising

a valve frame;

a valve plate mounted to the valve frame; and

wherein the valve plate is rotatable about an axis of rotation lying in a plane generally orthogonal to the flow channel.

20. The pendulum valve of claim 19, wherein the valve body further comprises a rotatable coupling mounting the valve plate to the valve frame at approximately a centerline of the valve plate.

21. The pendulum valve of claim 20, wherein the valve plate further comprises:

a first annular groove;

a first o-ring at least partially located in the first annular groove;

a second annular groove on the obverse side of the valve plate from the first annular groove;

a second o-ring at least partially located in the second annular groove;

wherein when the valve body is in the first fully closed position the first o-ring contacts the valve housing to form a seal; and

wherein when the valve body is in the second fully closed position the second o-ring contacts the valve housing to form a seal.