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Method of manufacturing inorganic nanotube

  • US 7,005,391 B2
  • Filed: 06/19/2003
  • Issued: 02/28/2006
  • Est. Priority Date: 06/19/2002
  • Status: Expired due to Term
First Claim
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1. A method of manufacturing an inorganic nanotube, comprising:

  • preparing a template on which a carbon nanotube (CNT) or a CNT array is formed;

    forming a ruthenium (Ru) thin film on the CNT by depositing ruthenium on the template using atomic layer deposition (ALD) at a temperature below 300°

    C.; and

    removing the CNT to obtain a ruthenium nanotube or ruthenium nanotube array.

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