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Microfabricated torsional drive utilizing lateral electrostatic force

  • US 7,005,775 B2
  • Filed: 05/09/2002
  • Issued: 02/28/2006
  • Est. Priority Date: 05/09/2001
  • Status: Expired due to Fees
First Claim
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1. A torsional drive, comprising:

  • a payload plate,a suspended frame, inner fixed combs,outer fixed combs,inner torsion beams and out torsion beams; and

    inner movable combs and outer movable combs and posts, wherein said inner movable combs that are attached to said payload plate, are hinged on said suspended frame with torsion beams from near the surface of said inner movable combs, and interdigit with said inner fixed combs slightly, and inner fixed combs and outer movable combs are fixed to said suspended frame, wherein said suspended frame, said inner fixed combs, said outer torsion beams, said outer movable comb, and said posts are electrically grounded and a layer of insulator is deposited thereon.

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