Packaged micromirror array for a projection display
First Claim
1. A packaged micromirror array for a projection display, comprising:
- a package having an array of micromirrors therein, each micromirror having a four-sided shape defined by four micromirror sides;
wherein the micromirrors are capable of movement between an OFF state and an ON state by pulse width modulation to achieve a gray scale image on a target; and
wherein each micromirror corresponds to a pixel in a viewed image on the target;
the package having a light transmissive window, wherein the array of micromirrors is disposed in the package having the light transmissive window;
the package further comprising a substantially rectangular mask disposed on or above the micromirror array; and
wherein each of the four micromirror sides of the micromirrors is not parallel to any sides of the rectangular mask.
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Accused Products
Abstract
In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror. The micromirrors of the present invention result in an improved contrast ratio, and the arrangement of the light source to micromirror array in the present invention results in a more compact system. Another feature of the invention is the ability of the micromirrors to pivot in opposite direction to on and off positions (the on position directing light to collection optics), where the movement to the on position is greater than movement to the off position. A further feature of the invention is a package for the micromirror array, the package having a window that is not parallel to the substrate upon which the micromirrors are formed. One example of the invention includes all the above features.
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Citations
71 Claims
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1. A packaged micromirror array for a projection display, comprising:
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a package having an array of micromirrors therein, each micromirror having a four-sided shape defined by four micromirror sides; wherein the micromirrors are capable of movement between an OFF state and an ON state by pulse width modulation to achieve a gray scale image on a target; and
wherein each micromirror corresponds to a pixel in a viewed image on the target;the package having a light transmissive window, wherein the array of micromirrors is disposed in the package having the light transmissive window; the package further comprising a substantially rectangular mask disposed on or above the micromirror array; and wherein each of the four micromirror sides of the micromirrors is not parallel to any sides of the rectangular mask. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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36. A packaged micromirror array, comprising:
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a package comprising an array of micromirrors, each micromirror having a four-sided shape defined by four micromirror sides; wherein the micromirrors are capable of movement between an OFF state and an ON state with pulse width modulation for forming an image on a target; the package further comprising a light transmissive window, wherein the array of micromirror is disposed in the package having the light transmissive window; wherein the array of micromirror is a rectangular array; wherein the four micromirror sides of each micromirror are not parallel to any sides of the rectangular array; and wherein the micromirrors comprise micromirror plates that are connected via hinges to a substrate, and wherein the substrate, micromirror plates and hinges are disposed in different planes. - View Dependent Claims (37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65)
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66. A packaged micromirror array, comprising:
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a package comprising an array of micromirrors, each micromirror having a four-sided shape defined by four micromirror sides; wherein the micromirrors are capable of movement between an OFF state and an ON state with pulse width modulation for forming an image on a target; the package further comprising a light transmissive window, wherein the array of micromirror is disposed in the package having the light transmissive window; wherein the array of micromirror is a rectangular array; wherein the four micromirror sides of each micromirror are not parallel to any sides of the rectangular array; wherein a getter is provided within the package; and wherein a stiction reducing agent is provided within the package.
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67. A packaged micromirror array, comprising:
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a package comprising an array of micromirrors, each micromirror having a four-sided shape defined by four micromirror sides; wherein the micromirrors are capable of movement between an OFF state and an ON state with pulse width modulation for forming an image on a target; the package further comprising a light transmissive window, wherein the array of micromirror is disposed in the package having the light transmissive window; wherein the array of micromirrors is a rectangular array; wherein the four micromirror sides of each micromirror are not parallel to any sides of the rectangular array; wherein a getter is provided within the package; and wherein the micromirrors are capable of rotating at least +12 degrees to the ON position.
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68. A packaged micromirror array, comprising:
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a package comprising an array of micromirrors, each micromirror having a four-sided shape defined by four micromirror sides; wherein the micromirrors are capable of movement between an OFF state and an ON state with pulse width modulation for forming an image on a target; the package further comprising a light transmissive window, wherein the array of micromirrors is disposed in the package having the light transmissive window; wherein the array of micromirror is a rectangular array; wherein the four micromirror sides of each micromirror are not parallel to any sides of the rectangular array; and wherein the packaged micromirror array is in HDTV format.
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69. A packaged micromirror array, comprising:
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a package comprising an array of micromirrors, each micromirror having a four-sided shape defined by four micromirror sides; wherein the micromirror are capable of movement between an OFF state and an ON state with pulse width modulation for forming an image on a target; the package further comprising a light transmissive window, wherein thy array of micromirrors is disposed in the package having the light transmissive window; wherein the array of micromirrors is a rectangular array; wherein the four micromirror sides of each micromirror are not parallel to any sides of the rectangular array; wherein a getter is provided within the package; and wherein the package is a hermetic package.
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70. A packaged micromirror array, comprising:
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a package comprising an array of micromirrors, each micromirror having a four-sided shape defined by four micromirror sides; wherein the micromirrors are capable of movement between an OFF state and an ON state with pulse width modulation for forming an image on a target; the package further comprising a light transmissive window, wherein the array of micromirror is disposed in the package having the light transmissive window; wherein the array of micromirrors is a rectangular array; wherein the four micromirror sides of each micromirror are not parallel to any sides of the rectangular array; a light absorbing layer under the micromirrors to decrease light scatter through the gaps between the micromirrors; and wherein from 64,000 to 2,000,000 micromirror are provided in the array.
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71. A packaged micromirror array, comprising:
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a package comprising an array of micromirrors, each micromirror having a four-sided shape defined by four micromirror sides; wherein the micromirrors are capable of movement between an OFF state and an ON state with pulse width modulation for forming an image on a target; the package further comprising a light transmissive window, wherein the array of micromirrors is disposed in the package having the light transmissive window; wherein the array of micromirrors is a rectangular array; wherein the four micromirror sides of each micromirror are not parallel to any sides of the rectangular array; and wherein the package is hermetic and further comprises a getter within the package, and wherein the micromirrors are capable of rotating at least +12 degrees, from a non-deflected state to the ON position, and wherein the micromirrors comprise micromirror plates that are connected via hinges to a substrate, the hinges having a width of from 0.1 to 10 um, and wherein the substrate, micromirror plates and hinges are disposed in different planes, and further comprising a light absorbing layer under the micromirrors to decrease light scatter through the gaps between the micromirrors.
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Specification