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Apparatus and methods for verifying the location of areas of interest within a sample in an imaging system

  • US 7,006,674 B1
  • Filed: 10/29/1999
  • Issued: 02/28/2006
  • Est. Priority Date: 10/29/1999
  • Status: Expired due to Term
First Claim
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1. A method for verifying a location of an area of interest within a sample, the method comprising:

  • locating a datum mark on the sample;

    identifying the area of interest within the sample;

    determining the location of the area of interest relative to the mark; and

    relocating the datum, wherein the location of the area of interest is verified if a dimensional error in locating the datum relative to relocating the datum is less than a tolerance value.

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