×

Fast high-accuracy multi-dimensional pattern inspection

  • US 7,006,712 B1
  • Filed: 11/10/2003
  • Issued: 02/28/2006
  • Est. Priority Date: 11/26/1997
  • Status: Expired due to Term
First Claim
Patent Images

1. A method for interpolating a vector-valued function, the vector-valued function relating a plurality of at least two-dimensional positions to a plurality of respective displacement vectors, the method comprising:

  • providing an array of grid elements, each grid element having a coordinate region, and each grid element containing at least a displacement vector magnitude and a displacement vector direction;

    providing a real-valued input position vector having real-valued coordinates, the coordinates falling within the coordinate region of a grid element;

    rounding the coordinates of the real-valued input position vector so as to provide an integer grid position vector;

    subtracting the integer grid position vector from the real-valued input position vector to provide a sub-grid position vector;

    using the integer grid position vector to access the contents of a grid element, the contents of the grid element including a displacement vector magnitude, and a displacement vector direction;

    using the displacement vector direction to provide a unit vector in the displacement vector direction;

    using the unit vector in the displacement vector direction and the sub-grid position vector to provide a component of the sub-grid position vector in the displacement vector direction;

    subtracting the displacement vector magnitude from the component of the sub-grid position vector in the displacement vector direction to provide an interpolated displacement vector magnitude; and

    combining the interpolated displacement vector magnitude, the unit vector in the displacement direction, and the displacement vector direction so as to provide an interpolated displacement vector corresponding to the real-valued input position vector.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×