Optical switching system

• US 7,006,720 B2
• Filed: 04/30/2002
• Issued: 02/28/2006
• Est. Priority Date: 04/30/2002
• Status: Expired due to Term

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Peeters, Eric, Volkel, Armin R., Hantschel, Thomas, Rosa, Michel A., DeBruyker, Dirk, Dunec, John L.
• Primary Examiner(s): Healy, Brian
• Assistant Examiner(s): Petkovsek, Daniel
• Application Number:
  US10/136,684
• Publication Number:
  US 20030202738A1
• Time in Patent Office: 1,400 Days
• Field of Search: 359/212, 359223-225, 359/846, 359/849, 359/872, 359/877, 385/16, 385/18, 385/40, 257/415
• US Class Current: 385/18
• CPC Class Codes: G02B 6/352 the reflective optical element having a shaped reflective surface, e.g. a reflective element comprising several reflective surfaces or facets that function together
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C

Abstract

A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.

Claims

1. A optical switching system comprising:

a moveable reflecting surface to redirect light from a light source;

a moveable electrode coupled to the moveable reflecting surface, the moveable electrode moving in a trajectory in a motion plane; and

a fixed electrode, the fixed electrode fixed to a substrate, the fixed electrode to control movement of said moveable electrode, the fixed electrode positioned laterally adjacent to the moveable electrode, such that when the moveable electrode moves through the trajectory and contacts the substrate, the moveable electrode is adjacent to and not superimposed over the fixed electrode.

2. The optical switching system of claim 1 wherein the moveable electrode is a cantilever.

3. The optical switching system of claim 1 wherein the reflecting surface is a cantilever.

4. The optical switching system of claim 1 wherein both the reflecting surface and the moving electrode is a single cantilever structure.

5. The optical switching system of claim 1 wherein the reflecting surface is coupled to a cantilever.

6. The optical switching system of claim 1 wherein the reflecting surface is coupled to a plurality of cantilevers, associated with a corresponding moveable electrode, each moveable electrode electrostatically coupled to a corresponding fixed electrode that controls movement of said moveable electrode.

7. The optical switching system of claim 1 wherein the moveable electrodes are coupled to a suspended member the fixed electrodes positioned such that the fixed electrodes are not in trajectory route of the moveable electrodes.

8. The optical switching system of claim 1 wherein the reflective surface is made of a high reflectivity metal.

9. The optical switching system of claim 8 wherein the high reflectivity metal is gold.

10. A optical switching system comprising:

a moveable reflecting surface to redirect light from a light source;

a moveable electrode coupled to the moveable reflecting surface; and

a fixed electrode wherein the fixed electrode is triangular in shape, the fixed electrode fixed to a substrate, the fixed electrode to control movement of said moveable electrode, the fixed electrode positioned such that when the moveable electrode is translated into the substrate along a line perpendicular to the surface of the substrate, the moveable electrode does not contact the fixed electrode.

11. The optical switching system of claim 10 wherein a cantilever support structure supports the moveable reflecting surface and the moveable electrode.

12. The optical switching system of claim 11 where the moveable reflecting surface and the moveable electrode are integrated into the cantilever support structure.

13. The optical switching system of claim 11 wherein the cantilever is made from a stressy metal.

14. The optical switching system of claim 10 further comprising:

a source of light that directs light towards the reflecting surface.