Pressure sensors having transducers positioned to provide for low drift
First Claim
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1. A pressure-sensor structure comprising:
- a substrate;
a compliant member mounted on said substrate and having a first surface and a second surface;
a first strain transducer associated with said compliant member; and
a second strain transducer associated with said compliant member;
wherein said first and second strain transducers are associated with said compliant member so that their outputs respond oppositely to deflection of said compliant member resulting from differential pressure across said compliant member but respond similarly to deformation of said substrate.
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Abstract
Implantable pressure sensors and methods for making and using the same. A feature of of at least some of the subject pressure sensors is that they are low-drift sensors. Additional features of representative pressure sensors include the presence of first and second strain transducers that are associated with a compliant member so that their outputs respond oppositely to deflection of the compliant member resulting from differential pressure across the compliant member but respond similarly to deformation of a substrate on which the compliant member is mounted. The subject pressure sensors find use in a variety of applications.
46 Citations
43 Claims
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1. A pressure-sensor structure comprising:
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a substrate; a compliant member mounted on said substrate and having a first surface and a second surface; a first strain transducer associated with said compliant member; and a second strain transducer associated with said compliant member; wherein said first and second strain transducers are associated with said compliant member so that their outputs respond oppositely to deflection of said compliant member resulting from differential pressure across said compliant member but respond similarly to deformation of said substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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Specification