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Manufacture of MEMS structures in sealed cavity using dry-release MEMS device encapsulation

  • US 7,008,812 B1
  • Filed: 05/30/2000
  • Issued: 03/07/2006
  • Est. Priority Date: 05/30/2000
  • Status: Expired due to Fees
First Claim
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1. A method of fabricating a microstructure in a sealed cavity comprising the steps of:

  • providing a substrate having a substantially planar support surface;

    depositing a first layer of sacrificial material over said planar support surface;

    depositing an etchable layer of structural material over said first layer of sacrificial material;

    forming a microstructure on said support surface by etching said layer of structural material, said microstructure contacting said substrate at least at an anchor point;

    depositing a second layer of sacrificial material over said microstructure;

    depositing a cap layer over said second layer of sacrificial material, said cap layer extending from points on said support surface, whereby said cap layer and said support surface define a capsule about an interior region containing said microstructure and said first and second sacrificial layers;

    forming one or more holes in said cap layer;

    introducing a dry plasma etchant into said interior region through said one or more holes, wherein said sacrificial material is chosen to have a high etch rate differential with respect to said structural material, so that said dry plasma etchant removes said first and second sacrificial layers while leaving said microstructure and said substrate substantially intact, thereby releasing said microstructure as a movable structure secured at said anchor point to said substrate; and

    sealing said one or more holes in said cap layer with a seal layer, thereby forming a sealed cavity that encapsulates said movable microstructure, said sealed cavity being defined by said seal layer and said planar support surface,wherein said etchant is oxygen plasma, said sacrificial material is photoresist and wherein said structural material is aluminum.

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