Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
First Claim
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1. A spatial light modulator, comprising:
- an optically transmissive substrate;
a silicon substrate;
wherein the silicon substrate and the optically transmissive substrate are bonded together forming a gap between the substrates; and
a plurality of deflectable micromirrors enclosed within the gap;
wherein electrodes are provided on the silicon substrate to pull the micromirrors towards the silicon substrate;
and wherein a conducting transparent layer is provided on the optically transmissive substrate to pull the micromirrors towards the optically transmissive substrate;
and wherein the micromirrors are deflected by the electrodes on the silicon substrate and by the conducting transparent layer.
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Abstract
A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.
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Citations
46 Claims
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1. A spatial light modulator, comprising:
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an optically transmissive substrate; a silicon substrate; wherein the silicon substrate and the optically transmissive substrate are bonded together forming a gap between the substrates; and a plurality of deflectable micromirrors enclosed within the gap; wherein electrodes are provided on the silicon substrate to pull the micromirrors towards the silicon substrate; and wherein a conducting transparent layer is provided on the optically transmissive substrate to pull the micromirrors towards the optically transmissive substrate; and wherein the micromirrors are deflected by the electrodes on the silicon substrate and by the conducting transparent layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A spatial light modulator, comprising:
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an optically transmissive substrate; a silicon substrate; wherein the silicon substrate and the optically transmissive substrate are bonded together with a spacer therebetween forming a gap between the substrates; a plurality of deflectable elements encapsulated within the gap; SRAM or DRAM circuitry and electrodes on the silicon substrate for pulling the micromirror in a first direction; an aperture layer on the optically transmissive substrate that allows light to pass only through a subset of the optically transmissive substrate; and a conducting transparent layer on the optically transmissive substrate for pulling the micromirrors in a second direction. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45)
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46. A projection system comprising:
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a light source; a spatial light modulator; and imaging optics; wherein the spatial light modulator comprises; an optically transmissive substrate; a silicon substrate; wherein the silicon substrate and the optically transmissive substrate are bonded together with a spacer therebetween forming a gap between the substrates; a plurality of deflectable elements encapsulated within the gap; SRAM or DRAM circuitry and electrodes on the silicon substrate for pulling the micromirror in a first direction; an aperture layer on the optically transmissive substrate that allows light to pass only through a subset of the optically transmissive substrate; and a conducting transparent layer on the optically transmissive substrate for pulling the micromirrors in a second direction.
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Specification