Electrode configuration for piano MEMs micromirror

• US 7,010,188 B2
• Filed: 09/08/2005
• Issued: 03/07/2006
• Est. Priority Date: 05/28/2002
• Status: Active Grant

• Current Assignee: Lumentum Operations, LLC (Lumentum Holdings Inc.)
• Original Assignee: Viavi Solutions, Inc. (Lumentum Holdings Inc.)
• Inventors: Miller, John Michael, Jin, Wenlin, Keyworth, Barrie, Ma, Yuan, Hess, David R.
• Primary Examiner(s): Pak, Sung
• Assistant Examiner(s): ROJAS, OMAR R
• Application Number:
  US11/220,552
• Publication Number:
  US 20060008201A1
• Time in Patent Office: 180 Days
• Field of Search: None
• US Class Current: 385/18
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 3/0062 Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/3544 2D constellations, i.e. with switching elements and switched beams located in a plane
• CPC Class Codes: G02B 6/356 in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links switching polarized beams G02B6/3594; power equalizers G02B6/356 and G02B6/3594; path selecting means H04Q11/0001
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.

Claims

1. A method of rotating a micro electro-mechanical (MEMs) device about a first axis from a first tilted position to a second tilted position, while bypassing a third position therebetween, comprising the steps of:

a) providing a pivoting member pivotally mounted above a substrate about the first axis and a second axis;

b) providing first and second electrodes on opposite sides of the first axis underneath the pivoting member for pivoting the first pivoting member about the first axis;

c) providing a third electrode along the first axis offset from the second axis for pivoting the pivoting member about the second axis;

d) gradually decreasing voltage to the first electrode, while gradually increasing voltage to the third electrode for rotating the pivoting member about the first axis away from the first position, and for rotating the pivoting member about the second axis, respectively; and

e) gradually decreasing voltage to the third electrode, while gradually increasing voltage to the second electrode for rotating the pivoting member about the second axis, and for rotating the pivoting member about the first axis, respectively, to the second position.

2. The method according to claim 1, wherein step c) includes extending the third electrode from adjacent the first electrode to adjacent the second electrode beneath the pivoting member.

3. The method according to claim 2, wherein step c) includes providing shields between the first and third electrodes, and between the second and third electrodes for limiting the amount of electrical cross-talk therebetween.

4. The method according to claim 3, wherein step c) includes providing the shields extending upwardly from the substrate.

5. The method according to claim 3, wherein step c) further includes providing the shields extending downwardly from the pivoting member.

6. The method according to claim 3, wherein step c) includes providing the shields extending downwardly from the pivoting member and upwardly from the substrate.

7. The method according to claim 1, wherein step b) includes offsetting a longitudinal axis of said first and second electrodes from a longitudinal axis of said pivoting member on an opposite side of said third electrode to ensure any mask misalignment of said pivoting member and said first and second electrodes can be compensated by said third electrode.

8. The method according to claim 1, wherein step a) includes providing the pivoting member with first and second supporting regions extending from opposite sides of first and second hinges, which enable rotation about the first and second axes, respectively;

and wherein said first and second hinges are positioned between said first and second supporting regions, whereby outer edges of said pivoting member are free of said hinges enabling adjacent pivoting members to be positioned in close proximity.

9. The method according to claim 8, wherein step a) includes providing an anchor post extending upwardly from the substrate between the first and second supporting regions from which the first hinge extends, and providing a gimbal ring extending from the first hinge from which the second hinge extends.

10. The method according to claim 8, wherein step a) includes providing the first and second electrodes with arms extending on either side of said second hinge.

11. The method according to claim 8, wherein step a) includes providing the pivoting member with an offset section along the first axis adjacent to the first and second hinges;

and wherein step c) includes providing the third electrode beneath the offset section.

12. The method according to claim 8, wherein step b) includes providing the first electrodes with an upper step proximate the first and second hinges, and a lower step below an outer free end of the first supporting region.

13. The method according to claim 1, wherein step b) includes providing a ground plane extending around the first electrode at a level higher than the first electrode defining a substantially vertical surface therebetween, wherein the substantially vertical surface comprises a dielectric surface for isolating the first electrode from the ground plane.

14. The method according to claim 1, further comprising after step c) the steps of:

i) launching an input optical beam into a switch including the MEMs device via an input port;

ii) dispersing the optical beam into a plurality of wavelength channels;

iii) directing one of the wavelength channels at the pivoting member in the first position for directing the one wavelength channel at a first output port;

iv) executing steps d) and e) to rotate the pivoting member into the second position for directing the one wavelength channels at a second port;

whereby the pivoting member bypasses the third position to avoid directing the one wavelength channel into a third port positioned between the first and second ports.

15. The method according to claim 14, wherein step i) includes separating the input optical beam into first and second sub-beams having the same polarization;

and wherein step iii) includes directing first and second sub-beams of the one wavelength channel at first and second supporting regions, respectively, of the pivoting member.

16. The method according to claim 14, further comprising directing the input optical beam at a concave mirror having optical power between steps i) and ii);

and directing the one wavelength channel at the concave mirror between steps ii) and iii).