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Yokeless hidden hinge digital micromirror device

  • US 7,011,415 B2
  • Filed: 11/18/2002
  • Issued: 03/14/2006
  • Est. Priority Date: 11/21/2001
  • Status: Active Grant
First Claim
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1. An array of pixel elements, comprising:

  • a mirror layer having a mirror associated with each pixel element;

    a single-thickness intermediate layer spaced under the mirror layer, the intermediate layer forming a hinge and at least one spring tip associated with each minor, the hinge supporting the mirror such that the mirror may tilt above the hinge layer; and

    an address layer spaced under the hinge layer, the address layer having circuitry for controlling operation of the pixel elements.

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