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Infrared thermopile detector system for semiconductor process monitoring and control

  • US 7,011,614 B2
  • Filed: 07/18/2003
  • Issued: 03/14/2006
  • Est. Priority Date: 05/08/2002
  • Status: Expired due to Term
First Claim
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1. A method of operating a semiconductor process including processing of or with a gas, said method comprising transmitting infrared radiation through the gas for infrared radiation absorbance by a desired component of said gas, detecting the infrared radiation transmitted through the gas with a thermopile detector, generating an output from said thermopile detector indicative of concentration of said selected component of said gas, and controlling one or more conditions in and/or affecting the semiconductor process, in response to said output.

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