Nitride semiconductor light emitting element and optical device containing it
First Claim
1. A nitride semiconductor light emitting device formed on a substrate of a hexagonal crystal system,comprising a light emitting layer having a quantum well structure with quantum well layers and barrier layers laminated alternately, wherein one or more of said quantum well layers is formed of InGaN or InAlGaN, and one or more of said barrier layers is formed of a nitride semiconductor layer containing As, wherein a concentration of said As in each of said barrier layers is more than 1×
- 1018/cm 3, and said As is less than 20% of group V elements present in each of said barrier layers.
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Abstract
According to an aspect of the present invention, a nitride semiconductor light emitting device includes a light emitting layer (106) having a quantum well structure with quantum well layers and barrier layers laminated alternately. The well layer is formed of a nitride semiconductor containing In, and the barrier layer is formed of a nitride semiconductor layer containing As, P or Sb. According to another aspect of the present invention, a nitride semiconductor light emitting device includes a light emitting layer having a quantum well structure with quantum well layers and barrier layers laminated alternately. The well layer is formed of GaN1−x−y−zAsxPySbz (0<x+y+z≦0.3), and the barrier layer is formed of a nitride semiconductor containing In.
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Citations
46 Claims
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1. A nitride semiconductor light emitting device formed on a substrate of a hexagonal crystal system,
comprising a light emitting layer having a quantum well structure with quantum well layers and barrier layers laminated alternately, wherein one or more of said quantum well layers is formed of InGaN or InAlGaN, and one or more of said barrier layers is formed of a nitride semiconductor layer containing As, wherein a concentration of said As in each of said barrier layers is more than 1× - 1018/cm 3, and said As is less than 20% of group V elements present in each of said barrier layers.
- View Dependent Claims (2, 3, 4, 5, 6, 9, 10, 11, 12, 23, 24, 26, 39, 40)
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7. A nitride semiconductor light emitting device formed on a substrate of a hexagonal crystal system.
comprising a light emitting layer having a quantum well structure with quantum well layers and barrier layers laminated alternately, wherein one or more of said quantum well layers is formed of InGaN or InAlGaN, and one or more of said barrier layers is formed of a nitride semiconductor layer containing P. wherein a concentration of said P in each of said barrier layers is more than 1× - 1019/cm3, and the P is less than 25% of group V elements present an each of said barrier layers.
- View Dependent Claims (30, 31, 32, 33, 41, 42)
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8. A nitride semiconductor light emitting device formed on a substrate of a hexagonal crystal system,
comprising a light emitting layer having a quantum well structure with quantum well layers and barrier layers laminated alternately, wherein one or more of said quantum well layers is formed of InGaN or InAlGaN, and one or more of said barrier layers is formed of a nitride semiconductor layer containing Sb, wherein a concentration of said Sb in each of said barrier layers is more than 1× - 1017/cm3, and the Sb is less than 15% of group V elements present in each of said barrier layers.
- View Dependent Claims (34, 35, 36, 37, 43, 44)
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13. A nitride semiconductor light emitting device formed on a substrate of a hexagonal crystal system,
comprising a light emitting layer having a quantum well structure with quantum well layers and barrier layers laminated alternately, wherein one or more of said well layers is formed of GaN1− - x−
y−
zAsxPySbz (0<
x+y+z≦
0.3), andone or more of said barrier layers is formed of a nitride semiconductor layer having an In content of more than 0.1% and less than 15% of group III elements. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 27, 28, 29, 45, 46)
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25. A nitride semiconductor light emitting device formed on a substrate of a hexagonal crystal system,
comprising a light emitting layer having a quantum well structure with quantum well layers and barrier layers laminated alternately, wherein one or more of said quantum well layers is formed of InGaN or InAlGaN, and one or more of said barrier layers is formed of a nitride semiconductor layer containing As, P or Sb, further comprising a light guide layer formed of GaN1− - x−
y−
zAsxPySbz (0≦
x≦
0.075, 0≦
y≦
0.1, 0≦
z≦
0.025, 0<
x+y+z), wherein said barrier layer has a bandgap energy smaller than that of said light guide layer.
- x−
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38. A method of forming a nitride semiconductor light emitting device formed on a substrate of a hexagonal crystal system,
comprising a light emitting layer having a quantum well structure with quantum well layers and barrier layers laminated alternately, wherein one or more of said quantum well layers is formed of InGaN or InAlGaN, and one or more of said barrier layers is formed of a nitride semiconductor layer containing As, P or Sb, further comprising a light guide layer, wherein said barrier layer has a bandgap energy smaller than that of said light guide layer, wherein said method comprises growing a well layer and growing a barrier layer, and wherein a growth break interval of at least 1 second and at most 180 seconds is provided between crystal growth of said well layer and crystal growth of said barrier layer.
Specification