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Wafer test apparatus including optical elements and method of using the test apparatus

  • US 7,012,440 B2
  • Filed: 03/02/2004
  • Issued: 03/14/2006
  • Est. Priority Date: 08/14/2001
  • Status: Expired due to Fees
First Claim
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1. A method of testing an electronic device on a wafer comprising:

  • prior to packaging a first light source with the electronic device, driving a second light source external to the electronic device with an electrical output from the electronic device on the wafer;

    supplying an optical output of the second light source to a photo detector; and

    examining an electrical signal output from the photo detector.

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