Storing mechanical potential in a MEMS device using a mechanically multi-stable mechanism

• US 7,012,491 B1
• Filed: 09/10/2002
• Issued: 03/14/2006
• Est. Priority Date: 09/10/2002
• Status: Expired due to Fees

• Current Assignee: Zyvex Labs, Llc
• Original Assignee: Zyvex Corporation
• Inventors: Ellis, Matthew D., Geisberger, Aaron
• Primary Examiner(s): Donovan, Lincoln
• Assistant Examiner(s): Rojas, Bernard
• Application Number:
  US10/238,319
• Time in Patent Office: 1,281 Days
• Field of Search: 335/78, 200/181
• US Class Current: 335/78
• CPC Class Codes: B25J 15/12 with flexible finger members
• CPC Class Codes: B25J 7/00 Micromanipulators specimen supports for investigating or analysing materials G01N23/2204; associated with microscopes G02B21/32; means for supporting or positioning the objects or the material in discharge tubes H01J37/20
• CPC Class Codes: B81B 2201/13 Mechanical connectors, i.e. not functioning as an electrical connector
• CPC Class Codes: B81B 3/0018 Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
• CPC Class Codes: B81C 99/002 Apparatus for assembling MEMS, e.g. micromanipulators micromanipulators per se B25J7/00

Abstract

A system and method for storing potential energy in a microcomponent is disclosed comprising a multi-stable element having two or more equilibrium states and a stopper to restrict the multi-stable element from entering at least one of the two or more equilibrium states. The pre-charged microcomponent may then preferably be transported to another location and use the stored potential energy to perform some action.

Claims

1. An apparatus, comprising:

a multi-stable element configured to transition toward ones of a plurality of equilibrium states;

a stopper configured to restrict the multi-stable element from entering at least one of the plurality of equilibrium states; and

a first microcomponent member operable by the transition of the multi-stable element to engage with a second microcomponent member;

wherein the first microcomponent member includes an opposing pair of connector arms configured to cooperate to engage the second microcomponent member.

2. The apparatus of claim 1 wherein engagement of the first and second microcomponent members corresponds to one of the plurality of equilibrium states.

3. The apparatus of claim 1 further comprising the second microcomponent member.

4. The apparatus of claim 1 wherein at least one of the first and second microcomponent members is at least a portion of a microcomponent selected from the group consisting of:

a gripper microcomponent;

a receptacle microcomponent; and

a connector microcomponent.

5. The apparatus of claim 1 wherein engagement of the first and second microcomponent members corresponds to one of the plurality of equilibrium states.

6. The apparatus of claim 1 wherein the opposing pair of connector arms is configured to grasp the second microcomponent member.

7. The apparatus of claim 1 wherein the opposing pair of connector arms is configured to grasp the second microcomponent member in response to transition of the multi-stable element to one of the plurality of equilibrium states.

8. The apparatus of claim 1 wherein the opposing pair of connector arms is configured to grasp the second microcomponent member in response to transition of the multi-stable element out of one of the plurality of equilibrium states.

9. The apparatus of claim 1 wherein the microcomponent is not anchored to a substrate.

10. The apparatus of claim 1 wherein at least one of the plurality of equilibrium states is a restricted equilibrium state into which the stopper is configured to restrict the multi-stable element from entering, the apparatus further comprising a pre-charging unit configured to provide charge energy to transition the multi-stable element from one of the plurality of equilibrium states and toward the restricted equilibrium state to at least a snap-through point between the one of the plurality of equilibrium states and the restricted equilibrium state.

11. The apparatus of claim 10 wherein the charge energy provided by the pre-charging unit comprises one of:

thermal energy;

electrostatic energy;

surface tension from drying forces;

magnetic energy; and

mechanical energy.

12. The apparatus of claim 10 further comprising a triggering object configured to provide release energy to transition the multi-stable element away from the restricted equilibrium state and toward the one of the plurality of equilibrium states.

13. The apparatus of claim 12 wherein the release energy is less than the charge energy.

14. The apparatus of claim 1 wherein the multi-stable element is a bi-stable element.

18. The apparatus of claim 13 further comprising:

means for releasing the preserved energy; and

means for providing energy to the element to move the element toward the first low-energy state to at least a snap-through point between the first and second low-energy states.

19. The system of claim 18 wherein energy required to move the element toward the second low-energy state until the element is stopped at a stop point by the movement stopping means is greater than energy required to move the element from the stop point to at least the snap-through point.

15. An apparatus, comprising:

means for moving an element between first and second low-energy states;

means for stopping movement of the element toward the second low-energy state prior to the element reaching the second low-energy state; and

means for coupling with a sub-millimeter object in response to movement of the element toward the first low-energy state;

wherein the coupling means includes a plurality of arms, wherein ones of the plurality of arms are configured to cooperatively respond to movement of the element between the first and second low-energy states to couple the apparatus and the sub-millimeter object.

16. The apparatus of claim 15 wherein the element moving means includes means for applying energy to the element to move the element between the first and second low-energy states.

17. The apparatus of claim 15 wherein the movement stopping means, by stopping movement of the element toward the second low-energy state prior to the element reaching the second low-energy state, preserves energy applied to the element by the energy applying means.

20. The apparatus of claim 15 wherein the coupling means includes the element moving means and the movement stopping means.

21. The apparatus of claim 15 wherein the element is an element of a micro-electro-mechanical (MEMS) device.

22. The apparatus of claim 15 wherein the element is an element of a component having at least one sub-millimeter feature, the component selected from the group consisting of:

a gripper;

a receptacle; and

a connector.

23. The apparatus of claim 15 further comprising the sub-millimeter object.

24. An apparatus, comprising:

a transportable microcomponent including;

a first device having first and second low-energy states;

an obstructor to prevent the first device from entering the second low-energy state after transporting from the first low-energy state to past a snap-through point, wherein energy is stored in the first device when the first device is loaded against the obstructor;

a linking apparatus configured to connect the microcomponent to a second device; and

at least one handle configured to accommodate gripping by a micromechanical manipulator.

25. The apparatus of claim 24 wherein the linking apparatus uses the energy stored in the first device to secure a connection between the microcomponent and the second device.

26. The apparatus of claim 24 wherein at least one of the microcomponent and the second device is selected from the group consisting of:

a gripper;

a receptacle; and

a connector.