Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
First Claim
Patent Images
1. A spatial light modulator device, comprising:
- a first substrate that is a semiconductor substrate having an array of electrodes and circuitry;
a second substrate having an array of deflectable elements; and
wherein the electrodes are associated with the deflectable elements for deflecting the deflectable elements.
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Abstract
A spatial light modulator including first and second substrate, and an array of deflectable elements disposed within a gap between the first and second substrates is disclosed herein. For electrostatically actuating the deflectable elements, an array of electrodes and circuitry is provided and positioned proximate to the deflectable elements.
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Citations
38 Claims
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1. A spatial light modulator device, comprising:
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a first substrate that is a semiconductor substrate having an array of electrodes and circuitry; a second substrate having an array of deflectable elements; and wherein the electrodes are associated with the deflectable elements for deflecting the deflectable elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A projector, comprising:
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a light source providing an illumination light; a spatial light modulator for modulating the illumination light, comprising a first substrate that is a semiconductor substrate having an array of electrodes and circuitry; a second substrate having an array of deflectable elements; and wherein the electrodes are associated with the deflectable elements for deflecting the deflectable elements; and a display target on which the modulated light is projected so as to produce a desired image.
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19. A spatial light modulator device, comprising:
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a first substrate having an array of circuitry and electrodes; an array of deflectable elements fabricated on a second substrate that is a semiconductor substrate; and wherein the first and second substrates are coupled to each other such that the deflectable elements are operable to be actuated by the electrodes. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 38)
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27. A double substrate device, comprising:
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first and second substrates, one of which is a silicon substrate forming a gap therebetween; an array of deflectable elements positioned within the gap so as to reflect when in their ON state, an incident light to a display target for producing a desired image. an array of electrodes for actuating the deflectable elements; wherein the first and second substrates are bonded together with a bonding material; and wherein the bonding material comprises epoxy. - View Dependent Claims (28, 29, 30, 31, 32, 37)
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33. A spatial light modulator device, comprising:
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an array of deflectable elements; a silicon substrate; and wherein the deflectable elements are held by another substrate other than the silicon substrate above the silicon substrate such that the deflectable elements are operable to reflect an incident light so as to produce an desired image; and wherein the two substrates are bonded together with a spacer disposed between the two substrates. - View Dependent Claims (34, 35, 36)
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Specification