Internally shock caged serpentine flexure for micro-machined accelerometer

• US 7,013,730 B2
• Filed: 12/15/2003
• Issued: 03/21/2006
• Est. Priority Date: 12/15/2003
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Malametz, David L.
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US10/736,330
• Publication Number:
  US 20050126287A1
• Time in Patent Office: 827 Days
• Field of Search: 248/618, 248/619, 248/621, 248/628, 267/165, 735/041.2, 735/041.4, 735/143.2, 735/143.6, 735/143.8
• US Class Current: 73/514.36
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2203/0163 Spring holders
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: B81B 7/0016 Protection against shocks or vibrations, e.g. vibration damping
• CPC Class Codes: G01P 15/08 with conversion into electric or magnetic values
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/082 for two degrees of freedom of movement of a single mass

Abstract

An apparatus and method for sensing accelerations and other forces. The apparatus having a capacitance pick-off force sensor having a proof mass that is suspended relative to a relatively stationary frame by a plurality of serpentine suspension members having internal caging. The device provides easily implemented fabrication modification for trading-off between input range and pick-off sensitivity by altering etching periods of the serpentine suspension members. The input range and pick-off sensitivity can be traded-off by enlarging or reducing the quantity of elongated flexure fingers forming the serpentine suspension member. Different ones of the elongated flexure fingers are optionally formed with different thicknesses, whereby the serpentine suspension member exhibits a spring rate that progressively increases as it is compressed by in-plane motion of the proof mass relative to the relatively stationary frame.

Claims

1. A micro-machined electromechanical sensor (MEMS) device, comprising a serpentine flexure comprising:

a plurality of spaced-apart elongated flexure members formed through the thickness of a substrate as substantially planar elements and being relatively narrow as measured crosswise to their longitudinal axes;

a plurality of relatively short interconnecting members arranged crosswise to the longitudinal axes of the elongated flexure members and interconnecting opposite ends of alternate pairs of the elongated flexure members in a serpentine configuration, including first and last relatively short interconnecting members arranged crosswise to the longitudinal axes of respective first and last ones of the elongated flexure members and being structured for interconnecting the respective first and last elongated flexure members between relatively movable and immovable device components; and

means for internally-caging one or more of the spaced-apart elongated flexure members, the means for internally-caging comprising an extension formed on one end of one or more of the interconnecting members and extending a part of the distance between one of the members interconnecting one pair of the spaced-apart elongated flexure members and an end of a next adjacent member interconnecting a next adjacent pair of the spaced-apart elongated flexure members.

2. The device of claim 1 wherein the plurality of spaced-apart elongated flexure members are resiliently flexible in a single direction that is substantially crosswise to their respective longitudinal axes.

3. The device of claim 2 wherein one or more of the plurality of spaced-apart elongated flexure members is thicker than one or more others of the elongated flexure members as measured along the single direction that is substantially crosswise to their respective longitudinal axes.

11. The device of claim 2, further comprising a relatively stationary frame and a moveable proof mass that is suspended from the frame for substantially in-plane motion by a pluarlity of the serpentine flexures.

12. The device of claim 11 wherein at least one of the frame and proof mass further comprises a promontory mass that is sized to span a part of the distance between an edge thereof and one of the crosswise interconnecting members.

13. The device of claim 12, further comprising a plurality of capacitive pickoff sensors formed between the proof mass and the frame.

4. A micro-machined electromechanical sensor (MEMS) device having a serpentine flexure, the serpentine flexure comprising:

a plurality of elongated flexure members each formed through the thickness of a substrate as substantially planar elements;

a relatively short interconnecting member arranged crosswise to the longitudinal axes of the elongated flexure members and interconnecting opposite ends of alternate pairs of the elongated flexure members in a serpentine configuration, one or more of the plurality of elongated flexure members being thicker than one or more others of the elongated flexure members; and

a small mass extending a part of a distance between adjacent elongated flexure members.

5. The device of claim 4, further comprising a relatively stationary frame and a moveable proof mass that is suspended from the frame by the serpentine flexure.

6. The device of claim 5 wherein at least one of the frame and proof mass further comprises a promontory mass that is sized to span a part of the distance between an edge thereof and one of the elongated flexure members.

7. A micro-machined electromechanical sensor (MEMS) device having a serpentine flexure, the serpentine flexure comprising:

a plurality of elongated flexure members each formed through the thickness of a substrate as substantially planar elements;

a relatively short interconnecting member arranged crosswise to the longitudinal axes of the elongated flexure members and interconnecting opposite ends of alternate pairs of the elongated flexure members in a serpentine configuration; and

a small mass comprising an extension formed on one end of the interconnecting member and extending a part of a distance between adjacent elongated flexure members.

8. The device of claim 7, further comprising a relatively stationary frame and a moveable proof mass that is suspended from the frame by the serpentine flexure.

9. The device of claim 8 wherein at least one of the frame and proof mass further comprises a promontory mass that is sized to span a part of a distance between an edge thereof and one of the interconnecting members.

10. The device of claim 8 wherein at least one of the interconnecting members further comprises an extension formed on one end of the interconnecting member and sized to span a part of a distance between the interconnecting member and an edge of an adjacent one of the frame and proof mass.